LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6寸inch Orientaiton Y-42°/36°/108° Kauri 250-500um
Siffofin fasaha
Suna | LiTaO3 | Matsayin tebur mai sauti LiTaO3 |
Axial | Z yanke +/- 0.2 ° | 36 ° Y yanke / 42 ° Y yanke / yanke(+ / - 0.2 °) |
Diamita | 76.2mm + / - 0.3mm /100± 0.2mm | 76.2mm + /-0.3mm100mm + /-0.3mm 0r 150± 0.5mm |
Datum jirgin sama | 22mm +/- 2mm | 22mm +/-2mm32mm +/-2mm |
Kauri | 500um +/-5mm1000um +/-5mm | 500um +/-20mm350um +/-20mm |
TTV | ≤10 ku | ≤10 ku |
Curie zafin jiki | 605°C +/- 0.7°C (Hanyar DTA) | 605°C +/-3°C (Hanyar DTA |
ingancin saman | goge fuska biyu | goge fuska biyu |
Yanke gefuna | zagaye gefen | zagaye gefen |
Mabuɗin Halaye
1.Crystal Structure da Electrical Performance
· Ƙarfafawar Crystallographic: 100% 4H-SiC polytype rinjaye, sifili multicrystalline inclusions (misali, 6H/15R), tare da XRD rocking kwana cika-nisa a rabin-mafi girma (FWHM) ≤32.7 arcsec.
Motsi mai ɗaukar nauyi: Motsawar lantarki na 5,400 cm²/V·s (4H-SiC) da motsin rami na 380 cm²/V·s, yana ba da damar ƙirar na'ura mai tsayi.
Taurin Radiation: Yana jurewa 1 MeV neutron iska mai guba tare da madaidaicin lalacewa na 1 × 10¹⁵ n/cm², manufa don aikace-aikacen sararin samaniya da makaman nukiliya.
2.Thermal da Mechanical Properties
Na Musamman Thermal Conductivity: 4.9 W/cm · K (4H-SiC), sau uku na silicon, goyon bayan aiki sama da 200°C.
Ƙwararren Ƙwararren Ƙwararrun Ƙwararru: CTE na 4.0 × 10⁻⁶ / K (25-1000 ° C), yana tabbatar da dacewa tare da marufi na tushen silicon da rage yawan damuwa na thermal.
3.Lalacewar Gudanarwa da Daidaitawa
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Yawan bututu: <0.3 cm⁻² (wafers 8-inch), ƙarancin rarrabuwa <1,000 cm⁻² (an tabbatar ta hanyar KOH etching).
Ingancin saman: CMP-gyara zuwa Ra <0.2 nm, saduwa da buƙatun flatness na darajar EUV.
Maɓallin Aikace-aikace
Domain | Yanayin aikace-aikace | Amfanin Fasaha |
Hanyoyin sadarwa na gani | 100G/400G Laser, silicon photonics matasan kayayyaki | InP iri substrates suna ba da damar bandgap kai tsaye (1.34 eV) da heteroepitax na tushen Si, yana rage asarar haɗaɗɗun gani. |
Sabbin Motocin Makamashi | 800V high-voltage inverters, onboard caja (OBC) | 4H-SiC substrates jure> 1,200 V, rage conduction asarar da 50% da tsarin girma da 40%. |
5G Sadarwa | Millimeter-wave RF na'urorin (PA/LNA), ma'aunin wutar lantarki na tushe | Semi-insulating SiC substrates (resistivity> 10⁵ Ω·cm) yana ba da damar haɗin kai mai tsayi (60 GHz+). |
Kayayyakin Masana'antu | Na'urori masu auna zafin jiki, masu canza wuta na yanzu, na'urori masu sarrafa makamashin nukiliya | InSb iri substrates (0.17 eV bandgap) suna isar da hankalin maganadisu har zuwa 300%@10 T. |
LiTaO₃ Wafers - Maɓallin Halayen
1. Mafi Girma Ayyukan Piezoelectric
Babban coefficients na piezoelectric (d₃₃ ~ 8-10 pC/N, K² ~ 0.5%) yana ba da damar manyan na'urorin SAW/BAW masu girma tare da asarar shigarwa <1.5dB don matattarar 5G RF
* Kyakkyawan haɗin lantarki na lantarki yana goyan bayan ƙira mai faɗi mai faɗi (≥5%) ƙirar tace don aikace-aikacen sub-6GHz da mmWave
2. Kayayyakin gani
· Bayyanar watsa labarai (> 70% watsa daga 400-5000nm) don masu amfani da na'urorin lantarki da ke cimma> 40GHz bandwidth
· Ƙarfi mai sauƙi na gani mara kyau (χ⁽²⁾ ~ 30pm/V) yana sauƙaƙe tsararrun jituwa na biyu (SHG) a cikin tsarin laser
3. Zaman Lafiyar Muhalli
Babban zafin jiki na Curie (600°C) yana kiyaye amsawar piezoelectric a cikin yanayin mota-40°C zuwa 150°C
Inertness na sinadarai a kan acid/alkalies (pH1-13) yana tabbatar da dogaro a aikace-aikacen firikwensin masana'antu
4. Ƙimar Ƙarfafawa
Injiniyan daidaitawa: X-cut (51°), Y-cut (0°), yanke-Z (36°) don keɓancewar martanin piezoelectric
Zaɓuɓɓukan Doping: Mg-doped (juriya na lalacewar gani), Zn-doped (ingantattun d₃₃)
Yana gamawa: Epitaxial-shirya gogewa (Ra<0.5nm), ITO/au ƙarfe
LiTaO₃ Wafers - Aikace-aikace na Farko
1. Modules na gaba na RF
· 5G NR SAW tacewa (Band n77/n79) tare da yawan zafin jiki na mitar (TCF) <|-15ppm/°C|
BAW resonators mai fa'ida mai girman gaske don WiFi 6E/7 (5.925-7.125GHz)
2. Hadin gwiwar Photonics
Mach-Zehnder modulators masu saurin sauri (> 100Gbps) don sadarwa mai daidaituwa
QWIP infrared detectors tare da yanke raƙuman raƙuman raƙuman ruwa daga 3-14μm
3. Kayan Lantarki na Mota
· Ultrasonic parking na'urori masu auna sigina tare da> 200kHz aiki mita
TPMS piezoelectric transducers tsira -40°C zuwa 125°C hawan keke na thermal
4. Tsarin Tsaro
Tace mai karɓar EW tare da> 60dB kin amincewa da banda-band
· Mai neman makami mai linzami IR windows masu watsa 3-5μm MWIR radiation
5. Fasaha masu tasowa
· Na'urori masu jujjuya ƙididdiga na gani don jujjuyawar microwave-zuwa na gani
Tsarin PMUT don hoton duban dan tayi na likita (> ƙudurin 20MHz)
LiTaO₃ Wafers - Ayyukan XKH
1. Gudanar da Sarkar Supply
· Gudanar da Boule-to-wafer tare da lokacin jagorar mako 4 don daidaitattun ƙayyadaddun bayanai
· Ingantattun kayan samarwa yana ba da fa'idar farashin 10-15% tare da masu fafatawa
2. Magani na Musamman
Wafering na musamman: 36°±0.5° Y-yanke don ingantaccen aikin SAW
Abubuwan da aka yi amfani da su: MgO (5mol%) doping don aikace-aikacen gani
Sabis na ƙarfe: Cr/Au (100/1000Å) ƙirar lantarki
3. Tallafin Fasaha
Halaye na kayan abu: XRD girgiza masu lankwasa (FWHM <0.01°), nazarin saman AFM
· Kwaikwayo na na'ura: FEM samfuri don inganta ƙirar tace tace SAW
Kammalawa
LiTaO₃ wafers suna ci gaba da ba da damar ci gaban fasaha a cikin hanyoyin sadarwa na RF, haɗaɗɗen hotunan hoto, da na'urori masu auna yanayi. Ƙwarewar kayan aiki na XKH, daidaiton masana'antu, da tallafin injiniya na aikace-aikacen suna taimaka wa abokan ciniki shawo kan ƙalubalen ƙira a cikin tsarin lantarki na gaba.


