Wafer LiTaO3 mai inci 2-8 inci 10x10x0.5 mm 1sp 2sp don Sadarwar 5G/6G
Sigogi na fasaha
| Suna | LiTaO3 mai ƙarfin gani | Matakan teburin sauti LiTaO3 |
| Axial | Yanke Z + / - 0.2 ° | Yanke 36 ° Y / Yanke 42 ° Y / Yanke X (+ / - 0.2 °) |
| diamita | 76.2mm + / - 0.3mm/ 100±0.2mm | 76.2mm + /-0.3mm 100mm + /-0.3mm 0r 150±0.5mm |
| Jirgin sama na Datatum | 22mm + / - 2mm | 22mm +/-2mm 32mm +/-2mm |
| Kauri | 500um +/-5mm 1000um +/-5mm | 500um +/-20mm 350um +/-20mm |
| TTV | ≤ 10um | ≤ 10um |
| Zafin jiki na Curie | 605 °C + / - 0.7 °C (Hanyar DTA) | 605 °C + / -3 °C (Hanyar DTA |
| Ingancin saman | gogewa mai gefe biyu | gogewa mai gefe biyu |
| Gefunan Chamfered | zagaye na gefe | zagaye na gefe |
Muhimman Halaye
1. Aikin Wutar Lantarki da Na gani
· Ma'aunin Electro-Optic: r33 ya kai 30 pm/V (yanke-X), 1.5× sama da LiNbO3, wanda ke ba da damar daidaita yanayin electro-optic mai faɗi (>40 GHz bandwidth).
· Faɗin Amsar Spectral: Yankin watsawa 0.4–5.0 μm (kauri mm 8), tare da gefen shaye-shayen ultraviolet ƙasa da 280 nm, ya dace da na'urorin laser na UV da na'urorin ɗigon quantum.
· Ƙaramin Haɗin Pyroelectric: dP/dT = 3.5×10⁻⁴ C/(m²·K), yana tabbatar da kwanciyar hankali a cikin na'urori masu auna zafin jiki masu zafi.
2. Abubuwan da ke cikin zafi da na inji
· Babban ƙarfin wutar lantarki: 4.6 W/m·K (yanke-X), ninki huɗu na quartz, mai dorewa -200–500°C zagayowar zafi.
· Ƙarancin Faɗaɗawar Zafi: CTE = 4.1×10⁻⁶/K (25–1000°C), wanda ya dace da marufin silicon don rage damuwa ta zafi.
3. Daidaitawar Lalacewa da Sarrafawa
· Yawan bututun micropipe: <0.1 cm⁻² (wafers inci 8), yawan tarkace <500 cm⁻² (an tabbatar ta hanyar etching KOH).
· Ingancin Sama: An goge CMP zuwa Ra <0.5 nm, yana biyan buƙatun matakin lithography na EUV.
Manhajoji Masu Mahimmanci
| Yanki | Yanayin Aikace-aikace | Fa'idodin Fasaha |
| Sadarwar gani | Na'urorin laser na DWDM 100G/400G, na'urorin silicon photonics masu haɗaka | Faɗin watsawar wafer na LiTaO3 da ƙarancin asarar jagorar raƙuman ruwa (α <0.1 dB/cm) suna ba da damar faɗaɗa hanyar C. |
| Sadarwa ta 5G/6G | Matatun SAW (1.8–3.5 GHz), matatun BAW-SMR | Wafers ɗin da aka yanke na 42° Y suna cimma Kt² >15%, suna ba da ƙarancin asarar sakawa (<1.5 dB) da kuma babban juyi (>30 dB). |
| Fasahar Quantum | Masu gano photon guda ɗaya, tushen sauya yanayin ƙasa | Babban ma'aunin da ba na layi ba (χ(2)=40 pm/V) da ƙarancin adadin duhu (<100 count/s) suna ƙara ingancin kwantum. |
| Sanin Masana'antu | Na'urori masu auna matsin lamba masu zafi, masu canza wutar lantarki na yanzu | Amsar piezoelectric ta LiTaO3 wafer (g33 >20 mV/m2) da kuma juriyar zafin jiki mai yawa (>400°C) sun dace da yanayi mai tsauri. |
Ayyukan XKH
1. Ƙirƙirar Wafer na Musamman
· Girma da Yankewa: Wafers mai inci 2-8 tare da yanke X/Y/Z, yanke 42° Y, da yanke kusurwa na musamman (±0.01° haƙuri).
· Kula da allurar rigakafi: Fe, Mg doping ta hanyar hanyar Czochralski (tsakanin maida hankali 10¹⁶–10¹⁹ cm⁻³) don inganta ma'aunin lantarki da kwanciyar hankali na zafi.
2. Fasahar Tsarin Ci gaba
;
· Tsarin Poling na Lokaci-lokaci (PPLT): Fasaha ta Smart-Cut don wafers na LTOI, wanda ke cimma daidaiton lokacin yanki na ±10 nm da kuma sauyawar mitar da ta dace da lokaci-lokaci (QPM).
· Haɗin kai daban-daban: Wafers ɗin haɗin LiTaO3 na Si-based (POI) tare da sarrafa kauri (300–600 nm) da kuma ƙarfin lantarki na zafi har zuwa 8.78 W/m·K don matatun SAW masu yawan mita.
3. Tsarin Gudanar da Inganci
;
· Gwaji Daga Ƙarshe Zuwa Ƙarshe: Raman spectroscopy (tabbatar da nau'in polytype), XRD (crystallinity), AFM (siffar saman), da gwajin daidaiton gani (Δn <5×10⁻⁵).
4. Tallafin Sarkar Samar da Kayayyaki na Duniya
;
· Ƙarfin Samarwa: Fitar da kayayyaki daga wafers 5,000 a kowane wata (inci 8: 70%), tare da isar da gaggawa na awanni 48.
· Cibiyar Sadarwar Jigilar Kaya: Rufewa a Turai, Arewacin Amurka, da Asiya-Pacific ta hanyar jigilar kaya ta iska/teku tare da marufi mai sarrafa zafin jiki.









