Wafers na Silicon Carbide SiC mai inci 6 150mm 4H-N don Binciken Samarwa na MOS ko SBD da kuma matakin Dummy
Filayen Aikace-aikace
Tsarin silinda mai inci 6 na silicon carbide yana taka muhimmiyar rawa a masana'antu da dama. Na farko, ana amfani da shi sosai a masana'antar semiconductor don ƙera na'urorin lantarki masu ƙarfi kamar transistor na wutar lantarki, da'irori masu haɗawa, da na'urorin wutar lantarki. Babban ƙarfinsa na zafi da juriya mai zafi yana ba da damar watsa zafi mafi kyau, wanda ke haifar da ingantaccen inganci da aminci. Na biyu, wafers na silicon carbide suna da mahimmanci a fannonin bincike don haɓaka sabbin kayayyaki da na'urori. Bugu da ƙari, wafer ɗin silicon carbide yana samun aikace-aikace masu yawa a fannin optoelectronics, gami da kera LEDs da diodes na laser.
Bayanin Samfura
Tsarin lu'ulu'u mai inci 6 na silicon carbide yana da diamita na inci 6 (kimanin 152.4 mm). Tsananin saman shine Ra < 0.5 nm, kuma kauri shine 600 ± 25 μm. Ana iya keɓance substrate ɗin ta hanyar amfani da nau'in N ko P, bisa ga buƙatun abokin ciniki. Bugu da ƙari, yana nuna kwanciyar hankali na injiniya, wanda ke iya jure matsin lamba da girgiza.
| diamita | 150±2.0mm(6inci) | ||||
| Kauri | 350 μm±25μm | ||||
| Hanya | A kan axis: <0001>±0.5° | Kashe axis: 4.0° zuwa 1120±0.5° | |||
| Nau'in Polytype | 4H | ||||
| Juriya (Ω · cm) | 4H-N | 0.015 ~ 0.028 Ω · cm/0.015 ~ 0.025ohm · cm | |||
| 4/6H-SI | >1E5 | ||||
| Babban shimfidar wuri mai faɗi | {10-10}±5.0° | ||||
| Tsawon lebur na farko (mm) | 47.5 mm±2.5 mm | ||||
| Gefen | Chamfer | ||||
| TTV/Bow/Warp (um) | ≤15 /≤40 /≤60 | ||||
| Gaban AFM (Si-face) | Yaren mutanen Poland Ra≤1 nm | ||||
| CMP Ra≤0.5 nm | |||||
| LTV | ≤3μm(10mm*10mm) | ≤5μm(10mm*10mm) | ≤10μm(10mm*10mm) | ||
| TTV | ≤5μm | ≤10μm | ≤15μm | ||
| Bawon lemu/rami/fashewa/gurɓatawa/tabo/tabo | Babu | Babu | Babu | ||
| Ɓoye | Babu | Babu | Babu | ||
Tsarin silinda mai inci 6 na silicon carbide abu ne mai matuƙar aiki wanda ake amfani da shi sosai a masana'antar semiconductor, bincike, da kuma masana'antar lantarki. Yana ba da kyakkyawan yanayin zafi, kwanciyar hankali na injiniya, da juriya ga zafin jiki mai yawa, wanda hakan ya sa ya dace da ƙera na'urorin lantarki masu ƙarfi da sabbin bincike na kayan aiki. Muna ba da ƙayyadaddun bayanai daban-daban da zaɓuɓɓukan keɓancewa don biyan buƙatun abokan ciniki daban-daban.Tuntube mu don ƙarin bayani game da wafers ɗin silicon carbide!
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