p-type 4H/6H-P 3C-N TYPE SIC substrate 4inch 〈111〉± 0.5°Zero MPD
4H/6H-P Nau'in SiC Combosite Substrates Common siga tebur
4 inch diamita SiliconCarbide (SiC) Substrate Ƙayyadaddun bayanai
Daraja | Zero MPD Production Darasi (Z Daraja) | Standard Production Darasi (P Daraja) | Dummy Grade (D Daraja) | ||
Diamita | 99.5mm ~ 100.0 mm | ||||
Kauri | 350 μm ± 25 μm | ||||
Wafer Orientation | Kashe axis: 2.0°-4.0°zuwa [1120] ± 0.5° don 4H/6H-P, On axis:〈111〉± 0.5° don 3C-N | ||||
Maƙarƙashiya Maɗaukaki | 0 cm - 2 | ||||
Resistivity | p-nau'in 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
n-nau'in 3C-N | ≤0.8 mΩ cm | ≤1 m Ωꞏcm | |||
Hannun Filayen Firamare | 4H/6H-P | - {1010} ± 5.0° | |||
3C-N | - {110} ± 5.0° | ||||
Tsawon Fitowa na Farko | 32.5 mm ± 2.0 mm | ||||
Tsawon Lantarki na Sakandare | 18.0 mm ± 2.0 mm | ||||
Gabatarwar Flat na Sakandare | Fuskar Silicon: 90° CW. daga Prime flat±5.0° | ||||
Ƙarƙashin Ƙarfi | 3 mm ku | 6 mm ku | |||
LTV/TTV/Baka/Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
Tashin hankali | Yaren mutanen Poland Ra≤1 nm | ||||
CMP Ra≤0.2 nm | ≤0.5 nm | ||||
Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙwara | Babu | Tsayin tarawa ≤ 10 mm, tsayi ɗaya≤2 mm | |||
Hex Plates Ta Babban Haske mai ƙarfi | Tarin yanki ≤0.05% | Tarin yanki ≤0.1% | |||
Wuraren Polytype Ta Hanyar Ƙarfin Ƙarfi | Babu | Tarin yanki≤3% | |||
Haɗin Carbon Na gani | Tarin yanki ≤0.05% | Tarin yanki ≤3% | |||
Silicon Surface Scratches By High Intensity Light | Babu | Tsayin tarawa≤1× diamita wafer | |||
Edge Chips High By Intensity Light | Babu wanda aka halatta ≥0.2mm nisa da zurfinsa | 5 izini, ≤1 mm kowanne | |||
Gurɓatar Silicon Surface Ta Babban Ƙarfi | Babu | ||||
Marufi | Cassette mai yawa-wafer ko kwantena wafer guda ɗaya |
Bayanan kula:
※ Iyakoki na lahani sun shafi gaba dayan farfajiyar wafer ban da wurin keɓe gefen. # Ya kamata a duba karce a fuskar Si kawai.
Nau'in P-nau'in 4H/6H-P 3C-N nau'in 4-inch SiC substrate tare da 〈111〉± 0.5° fuskantarwa da Zero MPD grade ana amfani da ko'ina a high-yi lantarki aikace-aikace. Kyakkyawan ƙarfin wutar lantarki da ƙarfin rushewar wutar lantarki ya sa ya dace da na'urorin lantarki, irin su manyan wutar lantarki, masu juyawa, da masu canza wuta, suna aiki a cikin matsanancin yanayi. Bugu da ƙari, juriya na substrate ga babban yanayin zafi da lalata yana tabbatar da ingantaccen aiki a cikin yanayi mara kyau. Madaidaicin 〈111〉± 0.5° yana haɓaka daidaiton masana'anta, yana sa ya dace da na'urorin RF da aikace-aikacen mitoci masu girma, kamar tsarin radar da kayan sadarwar mara waya.
Fa'idodin nau'in N-type SiC composite substrates sun haɗa da:
1. Haske mai zafi: ingantaccen zafi, sanya shi dace da mahimmin-zazzabi da aikace-aikacen babban aiki.
2. Babban fashewa da wutar lantarki: Tabbatar da aikin aminci a cikin aikace-aikacen babban ƙarfin lantarki kamar masu sauya masu canzawa da kuma masu sauya.
3. Zero MPD (Micro Pipe Defect) Matsayi: Yana ba da garantin ƙarancin lahani, samar da kwanciyar hankali da babban aminci a cikin na'urorin lantarki masu mahimmanci.
4. Juriya na Lalata: Mai dorewa a cikin yanayi mai tsauri, tabbatar da aiki na dogon lokaci a cikin yanayi mai buƙata.
5. Madaidaicin 〈111〉± 0.5° Gabatarwa: Yana ba da damar daidaitattun daidaituwa yayin masana'anta, haɓaka aikin na'urar a cikin mitoci da aikace-aikacen RF.
Gabaɗaya, nau'in P-nau'in 4H/6H-P 3C-N nau'in 4-inch SiC substrate tare da 〈111〉± 0.5° fuskantarwa da Zero MPD grade shine babban kayan aiki da ya dace don aikace-aikacen lantarki na ci gaba. Kyakkyawan ƙarfin wutar lantarki mai ƙarfi da ƙarfin rushewar wutar lantarki ya sa ya zama cikakke ga na'urorin lantarki kamar manyan wutan lantarki, masu juyawa, da masu juyawa. Makin MPD na Zero yana tabbatar da ƙarancin lahani, yana ba da aminci da kwanciyar hankali a cikin na'urori masu mahimmanci. Bugu da ƙari, juriya na substrate ga lalata da yanayin zafi yana tabbatar da dorewa a cikin yanayi mara kyau. Madaidaicin 〈111〉± 0.5° yana ba da damar daidaitaccen daidaitawa yayin masana'anta, yana mai da shi dacewa sosai ga na'urorin RF da aikace-aikacen mitoci masu girma.