SiC mai siffar lu'ulu'u guda ɗaya mai inci 6 akan polycrystalline SiC mai haɗa abubuwa Diamita 150mm Nau'in P nau'in N
Sigogi na fasaha
| Girman: | 6 inci |
| Diamita: | 150 mm |
| Kauri: | 400-500 μm |
| Sigogi na Fim na Monocrystalline SiC | |
| Nau'in da aka yi amfani da shi: | 4H-SiC ko 6H-SiC |
| Yawan shan kwayoyi: | 1×10¹⁴ - 1×10¹⁸ cm⁻³ |
| Kauri: | 5-20 μm |
| Juriyar Takarda: | 10-1000 Ω/sq |
| Motsi na Electron: | 800-1200 cm²/V |
| Motsi a Rami: | 100-300 cm²/V |
| Sigogi na Layer na Polycrystalline SiC Buffer | |
| Kauri: | 50-300 μm |
| Tsarin kwararar zafi: | 150-300 W/m·K |
| Sigogi na Substrate na Monocrystalline SiC | |
| Nau'in da aka yi amfani da shi: | 4H-SiC ko 6H-SiC |
| Yawan shan kwayoyi: | 1×10¹⁴ - 1×10¹⁸ cm⁻³ |
| Kauri: | 300-500 μm |
| Girman Hatsi: | > 1 mm |
| Taushin saman: | < 0.3 mm RMS |
| Kayan Inji & Kayan Wutar Lantarki | |
| Tauri: | 9-10 Mohs |
| Ƙarfin Matsi: | 3-4 GPA |
| Ƙarfin Taurin Kai: | 0.3-0.5 GPA |
| Ƙarfin Filin Rushewa: | > 2 MV/cm |
| Jimlar Juriyar Allura: | > 10 Mrad |
| Juriya ga Tasirin Tasirin Taron Guda ɗaya: | > 100 MeV·cm²/mg |
| Tsarin kwararar zafi: | 150-380 W/m·K |
| Yanayin Zafin Aiki: | -55 zuwa 600°C |
Muhimman Halaye
SiC mai inci 6 mai aiki da tsarin siC mai siffar polycrystalline yana ba da daidaito na musamman na tsarin kayan aiki da aiki, wanda hakan ya sa ya dace da yanayin masana'antu masu wahala:
1. Inganci da Farashi: Tushen SiC na polycrystalline yana rage farashi sosai idan aka kwatanta da SiC mai cikakken monocrystalline, yayin da Layer mai aiki na monocrystalline SiC yana tabbatar da aikin na'ura, wanda ya dace da aikace-aikacen da ke da sauƙin amfani da farashi.
2. Abubuwan da suka dace da Wutar Lantarki: Tsarin SiC mai kama da monocrystalline yana nuna babban motsi na ɗaukar kaya (>500 cm²/V·s) da ƙarancin lahani, yana tallafawa aikin na'urar mai yawan mita da ƙarfi.
3. Kwanciyar Hankali Mai Girma: Juriyar yanayin zafi mai yawa ta SiC (>600°C) tana tabbatar da cewa kayan haɗin sun kasance masu karko a ƙarƙashin yanayi mai tsauri, wanda hakan ya sa ya dace da motocin lantarki da aikace-aikacen motocin masana'antu.
Girman Wafer Mai Inci 4.6: Idan aka kwatanta da tsoffin SiC substrates na inci 4, tsarin inci 6 yana ƙara yawan amfanin guntu da sama da kashi 30%, yana rage farashin na'urar kowane raka'a.
5. Tsarin Gudanarwa: Matakan N-type ko P da aka riga aka yi amfani da su suna rage matakan dasa ion a cikin kera na'urori, suna inganta ingancin samarwa da yawan amfanin ƙasa.
6. Gudanar da Zafi Mafi Kyau: Tsarin wutar lantarki na tushen polycrystalline SiC (~120 W/m·K) yana fuskantar kusanci da na monocrystalline SiC, yana magance ƙalubalen wargaza zafi a cikin na'urori masu ƙarfi.
Waɗannan halaye suna sanya SiC mai inci 6 mai aiki da tsarin siminti na polycrystalline SiC a matsayin mafita mai gasa ga masana'antu kamar makamashi mai sabuntawa, jigilar jirgin ƙasa, da sararin samaniya.
Babban Aikace-aikace
An yi nasarar amfani da SiC mai inci 6 mai aiki da tsarin siC mai haɗakar polycrystalline a fannoni da dama masu matuƙar buƙata:
1. Motocin Wutar Lantarki: Ana amfani da su a cikin manyan motocin SiC MOSFET da diodes don haɓaka ingancin inverter da faɗaɗa kewayon baturi (misali, samfuran Tesla, BYD).
2. Motocin Masana'antu: Yana ba da damar amfani da na'urorin wutar lantarki masu zafi da yawan sauyawa, yana rage yawan amfani da makamashi a cikin manyan injina da injinan iska.
3. Masu Canza Hasken Hasken Rana: Na'urorin SiC suna inganta yadda ake canza hasken rana (>99%), yayin da kayan haɗin ke ƙara rage farashin tsarin.
4. Sufurin Jirgin Ƙasa: Ana amfani da shi a cikin na'urorin juyawa don tsarin jirgin ƙasa mai sauri da na jirgin ƙasa, yana ba da juriya mai ƙarfi (>1700V) da ƙananan abubuwan tsari.
5. Sararin Samaniya: Ya dace da tsarin wutar lantarki ta tauraron dan adam da kuma da'irorin sarrafa injinan jiragen sama, waɗanda ke iya jure yanayin zafi mai tsanani da hasken rana.
A cikin ƙera kayan aiki, SiC mai inci 6 mai aiki da simintin ...
Ayyukan XKH
XKH tana ba da cikakken tallafi ga SiC mai inci 6 mai aiki da sikirin siC mai haɗa polycrystalline, wanda ke rufe R&D zuwa samar da taro:
1. Keɓancewa: Kauri mai daidaitacce na Layer monocrystalline (5–100 μm), yawan shan maganin da ke haifar da doping (1e15–1e19 cm⁻³), da kuma yanayin lu'ulu'u (4H/6H-SiC) don biyan buƙatun na'urori daban-daban.
2. Sarrafa Wafer: Samar da kayayyaki masu girman inci 6 tare da ayyukan rage radadi a bayan gida da kuma ƙara ƙarfe don haɗakarwa da kunnawa.
3. Tabbatar da Fasaha: Ya haɗa da nazarin lu'ulu'u na XRD, gwajin tasirin Hall, da kuma auna juriyar zafi don hanzarta cancantar kayan.
4. Tsarin Samfura Mai Sauri: Samfuran inci 2 zuwa 4 (tsari ɗaya) don cibiyoyin bincike don hanzarta zagayowar ci gaba.
5. Binciken Gaskewa & Ingantawa: Magani na matakin kayan aiki don ƙalubalen sarrafawa (misali, lahani na Layer na epitaxial).
Manufarmu ita ce mu kafa SiC mai inci 6 mai aiki da tsarin sarrafawa akan polycrystalline SiC composite substrate a matsayin mafita mafi dacewa don amfani da wutar lantarki ta SiC, wanda ke ba da tallafi daga ƙarshe zuwa ƙarshe daga samfurin samfuri zuwa samar da girma.
Kammalawa
SiC mai inci 6 mai aiki da tsarin SiC mai haɗakarwa yana cimma daidaito tsakanin aiki da farashi ta hanyar sabon tsarin haɗakar mono/polycrystalline. Yayin da motocin lantarki ke ƙaruwa kuma masana'antar 4.0 ke ci gaba, wannan substrate yana samar da tushe mai inganci ga na'urorin lantarki na zamani. XKH tana maraba da haɗin gwiwa don ƙara bincika yuwuwar fasahar SiC.








