Matakin Haɗakar Iska Mai Tsayi na Ultra-Precision SiC
Cikakken Zane
Bayani
Tare da ci gaba da ci gaban masana'antar semiconductor, kayan aiki na sarrafawa da dubawa suna buƙatar aiki mafi girma. Gina kan ƙwarewa mai zurfi a cikin sarrafa motsi da matsayi na matakin nanometer, mun haɓaka matakin ɗaukar iska mai siffar H-type mai kusurwa biyu.
An ƙera shi da tsarin yumbu mai inganci wanda aka inganta shi da silicon carbide (SiC) da fasahar ɗaukar iska mai ramawa, matakin yana ba da daidaito mai kyau, tauri, da kuma amsawa mai ƙarfi. Ya dace da:
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Sarrafa da dubawa na Semiconductor
Ƙirƙirar ƙananan/nano da kuma tsarin aiki
Yanke da gogewa a sikelin nanometer
Babban saurin dubawa daidaitacce
Mahimman Sifofi
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Jagorar ɗaukar iska ta SiCdon tsananin tauri da daidaito
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Babban kuzari: gudu har zuwa 1 m/s, hanzari har zuwa 4 g, saurin daidaitawa
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Gantry Y-axis mai tuƙi biyuyana tabbatar da ƙarfin kaya mai yawa da kwanciyar hankali
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Zaɓuɓɓukan mai ɓoye bayanai: na'urar auna haske ko na'urar auna haske ta laser
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Daidaiton matsayi: ±0.15 μm;maimaituwa: ±75 nm
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Ingantaccen hanyar sadarwa ta kebuldon tsari mai tsabta da aminci na dogon lokaci
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Saitunan da za a iya keɓancewadon buƙatun takamaiman aikace-aikace
Tsarin Tsari Mai Tsayi & Tuƙi Kai Tsaye, Tsarin Gine-gine Mara Saduwa
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Tsarin yumbu na SiC: ~5× taurin ƙarfen aluminum da ~5× ƙarancin faɗaɗa zafi, yana tabbatar da kwanciyar hankali mai sauri da ƙarfin zafi.
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Na'urar ɗaukar iska mai diyya: Tsarin mallaka yana ƙara tauri, ƙarfin kaya, da kuma daidaiton motsi.
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Aiki Mai Sauƙi: Yana tallafawa saurin 1 m/s da saurin 4 g, wanda ya dace da manyan hanyoyin sarrafawa.
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Haɗin kai mara matsala: Ya dace da tsarin keɓewar girgiza, matakan juyawa, kayan karkatarwa, da dandamalin sarrafa wafer.
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Gudanar da Kebul: Radius mai lanƙwasawa mai sarrafawa yana rage damuwa don tsawaita rayuwar sabis.
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Motar layi mara Coreless: Motsi mai santsi ba tare da ƙarfin haɗa kai ba.
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Motoci da yawa: Sanya injin da ke ɗauke da kaya yana inganta daidaito, daidaito, da kuma daidaiton kusurwa.
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Warewa a Yanayin Zafi: An ware motoci daga tsarin mataki; sanyaya iska ko ruwa na zaɓi don zagayowar aiki mai ƙarfi.
Bayani dalla-dalla
| Samfuri | 400-400 | 500-500 | 600-600 |
|---|---|---|---|
| Gatari | X (dubawa) / Y (mataki) | X (dubawa) / Y (mataki) | X (dubawa) / Y (mataki) |
| Tafiya (mm) | 400 / 400 | 500 / 500 | 600 / 600 |
| Daidaito (μm) | ±0.15 | ±0.2 | ±0.2 |
| Maimaitawa (nm) | ±75 | ±100 | ±100 |
| ƙuduri (nm) | 0.3 | 0.3 | 0.3 |
| Matsakaicin Sauri (m/s) | 1 | 1 | 1 |
| Hanzari (g) | 4 | 4 | 4 |
| Daidaito (μm) | ±0.2 | ±0.3 | ±0.4 |
| Kwanciyar hankali (nm) | ±5 | ±5 | ±5 |
| Matsakaicin Lodi (kg) | 20 | 20 | 20 |
| Fitowa/Birgima/Yaw (bakan-sec) | ±1 | ±1 | ±1 |
Sharuɗɗan Gwaji:
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Iska mai ƙarfi: tsabta, bushe; wurin raɓa ≤ 0°F; tace barbashi ≤ 0.25 μm; ko kuma 99.99% nitrogen.
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An auna daidaito a 25 mm sama da tsakiyar mataki a 20±1°C, 40–60% RH.
Aikace-aikace
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Lithography na Semiconductor, dubawa, da kuma sarrafa wafer
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Tsarin ƙira na micro/nano da daidaito
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Masana'antar gani mai inganci da kuma interferometry
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Tashar Jiragen Sama da kuma ci gaban binciken kimiyya
Tambayoyi da Amsoshi - Matsayin Haɗakar Iska na Silicon Carbide
1. Menene matakin ɗaukar iska?
Wani matakala mai ɗaukar iska yana amfani da siririn fim na iska mai matsin lamba tsakanin matakalar da hanyar jagora don samar damotsi mara gogayya, mara sawa, kuma mai santsi sosaiBa kamar bearings na inji na gargajiya ba, yana kawar da zamewar sanda, yana samar da daidaiton matakin nanometer, kuma yana tallafawa aminci na dogon lokaci.
2. Me yasa ake amfani da silicon carbide (SiC) don tsarin mataki?
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Babban tauri: ~5× na aluminum gami, yana rage lalacewar yayin motsi mai motsi.
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Ƙarancin faɗaɗawar zafi: ~ 5× ƙasa da aluminum, yana kiyaye daidaito a ƙarƙashin bambancin zafin jiki.
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Mai Sauƙi: Ƙananan yawa idan aka kwatanta da ƙarfe, wanda ke ba da damar yin aiki mai sauri da sauri.
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Kyakkyawan kwanciyar hankali: Ingantaccen damping da tauri don sanya matsayi mai kyau.
3. Shin matakin yana buƙatar man shafawa ko gyarawa?
Ba a buƙatar man shafawa na gargajiya ba tunda akwaibabu hulɗa ta injiGyaran da aka ba da shawarar ya haɗa da:
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Samarwaiska mai tsabta, busasshiyar iska mai matsewa ko nitrogen
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Duba matatun mai da na'urorin busarwa lokaci-lokaci
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Kebul na saka idanu da tsarin sanyaya
4. Menene buƙatun samar da iska?
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Yanayin raɓa: ≤ 0 °F (≈ –18 °C)
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Tacewar ƙwayoyin cuta: ≤ 0.25 μm
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Iska mai tsabta, busasshiya ko kuma sinadarin nitrogen mai tsafta kashi 99.99%
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Matsi mai ƙarfi tare da ƙaramin canji
game da Mu
XKH ta ƙware a fannin haɓaka fasaha, samarwa, da kuma sayar da gilashin gani na musamman da sabbin kayan lu'ulu'u. Kayayyakinmu suna ba da kayan lantarki na gani, na'urorin lantarki na masu amfani, da kuma sojoji. Muna ba da kayan gani na Sapphire, murfin ruwan tabarau na wayar hannu, yumbu, LT, Silicon Carbide SIC, Quartz, da wafers na lu'ulu'u na semiconductor. Tare da ƙwarewa mai ƙwarewa da kayan aiki na zamani, mun yi fice a fannin sarrafa samfura marasa tsari, da nufin zama babban kamfanin fasahar zamani na kayan lantarki na optoelectronic.
