Tube Mai Kwance na Silicon Carbide (SiC)

Hoton da aka Fito da shi na Tube na Silicon Carbide (SiC)

Takaitaccen Bayani:

Bututun Tanderu na Kwance-kwance na Silicon Carbide (SiC) yana aiki a matsayin babban ɗakin aiwatarwa da iyaka ga matsin lamba don halayen iskar gas mai zafi da kuma maganin zafi da ake amfani da su a cikin ƙera semiconductor, kera photovoltaic, da kuma sarrafa kayan aiki na zamani.

Aika mana imel

Siffofi

Cikakken Zane

Matsayin Samfura & Shawarar Darajarsu

An ƙera wannan bututun da tsarin SiC guda ɗaya, wanda aka ƙera da ƙari tare da wani kariyar CVD-SiC mai yawa, yana ba da damar watsa zafi mai kyau, ƙarancin gurɓatawa, ƙarfin injina, da kuma juriyar sinadarai masu ban mamaki.
Tsarinsa yana tabbatar da daidaiton yanayin zafi mai kyau, tsawaita lokacin sabis, da kuma aiki na dogon lokaci mai dorewa.

Babban Amfanin

Yana ƙara daidaiton zafin tsarin, tsafta, da kuma ingancin kayan aiki gaba ɗaya (OEE).
Yana rage lokacin tsaftacewa da kuma tsawaita zagayowar maye gurbin, yana rage jimlar farashin mallakar (TCO).
Yana samar da ɗaki mai tsawon rai wanda zai iya sarrafa sinadarai masu yawan iskar oxygen da chlorine mai yawan zafin jiki ba tare da haɗari ba.

Yanayi Mai Amfani & Tagar Tsarin Aiki

Iskar gas mai amsawa: iskar oxygen (O₂) da sauran gaurayawan iskar oxygen
Iskar gas mai ɗaukar kaya/kariya: nitrogen (N₂) da iskar gas mara tsarki sosai
Nau'ikan da suka dace: gano iskar gas mai ɗauke da chlorine (wanda girke-girke ke sarrafa tattarawa da lokacin zama)

Tsarin Aiki na Kullum: bushewa/danshi, annealing, yaɗuwa, ajiyar LPCVD/CVD, kunna saman, passivation na photovoltaic, haɓakar bakin ciki mai aiki, carbonization, nitridation, da ƙari.

Yanayin Aiki

Zafin jiki: zafin jiki na ɗaki har zuwa 1250 °C (ba da izinin 10-15% na kariya dangane da ƙirar hita da ΔT)
Matsi: daga matakan injin tsotsar ƙasa/LPCVD zuwa matsin lamba mai kyau na kusan yanayi (ƙayyadadden ƙayyadaddun bayanai ga kowane odar siye)

Kayan Aiki & Manhaja ta Tsarin

Jikin SiC Mai Sauƙi (An ƙera Ƙari)

β-SiC mai yawan yawa ko SiC mai matakai da yawa, wanda aka gina a matsayin abu ɗaya—babu haɗin gwiwa ko dinki da aka yi da braced wanda zai iya zubewa ko haifar da wuraren damuwa.
Babban ƙarfin lantarki na thermal yana ba da damar amsawar zafi cikin sauri da kuma daidaiton zafin jiki na axial/radial.
Ƙaramin ƙarfin faɗaɗawar zafi (CTE) yana tabbatar da daidaiton girma da hatimin da aka dogara da shi a yanayin zafi mai yawa.

Rufin Aiki na CVD SiC

An ajiye a cikin wurin, mai tsarki sosai (ƙazanta a saman/rufi ƙasa da 5 ppm) don hana samar da ƙwayoyin cuta da sakin ion na ƙarfe.
Kyakkyawan rashin kuzarin sinadarai akan iskar oxygen da ke ɗauke da sinadarin chlorine, yana hana kai hari ga bango ko sake zubar da shi.
Zaɓuɓɓukan kauri na musamman na yanki don daidaita juriyar tsatsa da amsawar zafi.

Amfanin Haɗaɗɗiya: jikin SiC mai ƙarfi yana ba da ƙarfin tsari da kuma isar da zafi, yayin da Layer na CVD yana ba da garantin tsabta da juriya ga tsatsa don mafi girman aminci da fitarwa.

Manufofin Aiki Masu Muhimmanci

Zafin amfani mai ci gaba:≤ 1250 °C
Abubuwan da ke haifar da gurɓataccen substrate:<300 ppm
Gurɓatattun saman CVD-SiC:<5 ppm
Juriyar Girma: OD ±0.3–0.5 mm; haɗin kai ≤ 0.3 mm/m (akwai ƙarin ƙarfi)
Tsananin bango na ciki: Ra ≤ 0.8–1.6 µm (zaɓi ne a goge shi ko a goge shi kusa da madubi)
Yawan zubar da Helium: ≤ 1 × 10⁻⁹ Pa·m³/s
Juriyar girgizar zafi: yana tsira daga maimaita zagayowar zafi/sanyi ba tare da fashewa ko fashewa ba
Haɗa ɗakin tsaftacewa: ISO Class 5–6 tare da matakan ragowar barbashi/ƙarfe-ion masu inganci

Saita & Zaɓuɓɓuka

Tsarin lissafi: OD 50–400 mm (mafi girma idan aka yi la'akari da shi) tare da dogon gini mai sassa ɗaya; kauri na bango wanda aka inganta don ƙarfin injina, nauyi, da kwararar zafi.
Tsarin ƙarshe: flanges, bell-mouth, bayonet, zoben da aka gano, ramukan O-ring, da kuma tashoshin fitar da iska ko matsin lamba na musamman.
Tashoshin aiki: hanyoyin ciyar da thermocouple, kujerun gani-gilashi, hanyoyin shiga iskar gas—duk an ƙera su ne don aiki mai zafi sosai, mai hana zubewa.
Tsarin shafa: bangon ciki (tsoho), bangon waje, ko cikakken rufewa; kariyar da aka yi niyya ko kauri mai ƙima don yankuna masu ƙarfi.
Kula da tsafta da kuma tsaftace saman: maki masu tsauri da yawa, tsaftacewar ultrasonic/DI, da kuma hanyoyin yin gasa/bushe na musamman.
Kayan haɗi: flanges na graphite/yumbu/ƙarfe, hatimi, kayan aiki, hannun riga, da kuma maƙallan ajiya.

Kwatanta Aiki

Ma'auni	Tube na SiC	Bututun Quartz	Bututun Aluminum	Bututun Graphite
Maida wutar lantarki ta thermal	Babban, iri ɗaya	Ƙasa	Ƙasa	Babban
Ƙarfin zafi/raguwa mai yawa	Madalla sosai	Adalci	Mai kyau	Mai kyau (mai saurin amsawa ga iskar oxygen)
Girgizar zafi	Madalla sosai	Mai rauni	Matsakaici	Madalla sosai
Tsafta / ions na ƙarfe	Madalla (ƙasa)	Matsakaici	Matsakaici	Talaka
Oxidation & Cl-chemistry	Madalla sosai	Adalci	Mai kyau	Matsakaici (yana lalata iskar oxygen)
Farashi idan aka kwatanta da tsawon lokacin sabis	Matsakaici / Tsawon Rai	Ƙasa / gajere	Matsakaici / matsakaici	Matsakaici / iyakance ga muhalli

Tambayoyin da Ake Yawan Yi (FAQ)

T1. Me yasa za a zaɓi jikin SiC mai siffar 3D?
A. Yana kawar da dinki da brazes waɗanda zasu iya zubarwa ko tattara damuwa, kuma yana tallafawa yanayin ƙasa mai rikitarwa tare da daidaiton girma mai daidaito.

T2. Shin SiC yana jure wa iskar gas mai ɗauke da chlorine?
A. Eh. CVD-SiC ba shi da ƙarfi sosai a cikin iyakokin zafin jiki da matsin lamba da aka ƙayyade. Ga wuraren da ke da tasirin gaske, ana ba da shawarar a yi amfani da rufin da ke da kauri da kuma tsarin tsaftacewa/shaye mai ƙarfi.

T3. Ta yaya yake yin fice fiye da bututun quartz?
A. SiC yana ba da tsawon rai na sabis, ingantaccen daidaiton zafin jiki, ƙarancin gurɓatar ƙwayoyin cuta/ƙarfe-ion, da kuma ingantaccen TCO—musamman fiye da ~900 °C ko a cikin yanayin iskar oxygen/chlorine.

T4. Shin bututun zai iya jure saurin gudu mai zafi?
A. Eh, idan aka bi ƙa'idodin ΔT mafi girma da kuma ƙimar gudu. Haɗa jikin mai girman κ SiC da siririn Layer na CVD yana tallafawa saurin sauyawar zafi.

T5. Yaushe ake buƙatar maye gurbin?
A. Sauya bututun idan ka gano fashewar flange ko gefen, ramukan rufi ko kuma ɗigon ruwa, ƙaruwar yawan zubewa, yawan zafin jiki, ko kuma samar da barbashi mara kyau.

game da Mu

XKH ta ƙware a fannin haɓaka fasaha, samarwa, da kuma sayar da gilashin gani na musamman da sabbin kayan lu'ulu'u. Kayayyakinmu suna ba da kayan lantarki na gani, na'urorin lantarki na masu amfani, da kuma sojoji. Muna ba da kayan gani na Sapphire, murfin ruwan tabarau na wayar hannu, yumbu, LT, Silicon Carbide SIC, Quartz, da wafers na lu'ulu'u na semiconductor. Tare da ƙwarewa mai ƙwarewa da kayan aiki na zamani, mun yi fice a fannin sarrafa samfura marasa tsari, da nufin zama babban kamfanin fasahar zamani na kayan lantarki na optoelectronic.