Tukunyar tiren siliki mai siffar silicon carbide bututun siliki mai siffar silicon carbide yana samar da yanayin zafi mai zafi da sarrafawa na musamman

Silinda mai tsotsar tiren yumbu na silicon carbide bututun yumbu na silicon carbide yana samar da sintering mai zafi mai zafi da sarrafawa na musamman Hoton da aka nuna

Takaitaccen Bayani:

Tiren yumbu na silicon carbide da bututun yumbu na silicon carbide su ne kayan aiki masu inganci a masana'antar semiconductor. Ana amfani da tiren yumbu na silicon carbide galibi wajen sarrafa wafer, don tabbatar da daidaiton tsari mai inganci; Ana amfani da bututun yumbu na silicon carbide sosai a cikin bututun tanderu masu zafi, bututun tanderu masu yaɗuwa da sauran yanayi don jure wa yanayi mai tsauri da kuma kula da ingantaccen sarrafa zafi. Dukansu sun dogara ne akan silicon carbide a matsayin babban kayan, wanda ya zama babban sashi a masana'antar semiconductor saboda kyawawan halayensa na zahiri da sinadarai.

Aika mana imel

Siffofi

Babban fasali:

1. Tiren yumbu na silicon carbide
- Babban tauri da juriyar lalacewa: tauri yana kusa da lu'u-lu'u, kuma yana iya jure wa lalacewar injiniya a cikin sarrafa wafer na dogon lokaci.
- Babban ƙarfin zafi da ƙarancin faɗuwar zafi: watsa zafi cikin sauri da kwanciyar hankali na girma, guje wa nakasa da damuwa ta zafi ke haifarwa.
- Babban lanƙwasa da ƙarewar saman: Lanƙwasa saman yana kai matakin micron, yana tabbatar da cikakken hulɗa tsakanin wafer da faifai, yana rage gurɓatawa da lalacewa.
Kwanciyar hankali ta sinadarai: Ƙarfin juriya ga tsatsa, wanda ya dace da tsaftace danshi da kuma hanyoyin sassaka abubuwa a masana'antar semiconductor.
2. Bututun yumbu na silicon carbide
- Juriyar zafin jiki mai yawa: Zai iya aiki a yanayin zafi mai yawa sama da 1600°C na dogon lokaci, ya dace da tsarin zafin jiki mai yawa na semiconductor.
Kyakkyawan juriya ga lalata: juriya ga acid, alkalis da nau'ikan sinadarai daban-daban, wanda ya dace da yanayin aiki mai tsauri.
- Babban tauri da juriya ga lalacewa: tsayayya da zaizayar ƙwayoyin cuta da lalacewar injina, tsawaita rayuwar sabis.
- Babban ƙarfin zafi da ƙarancin ƙarfin faɗaɗa zafi: saurin watsa zafi da kwanciyar hankali na girma, rage lalacewa ko fashewa da damuwa ta zafi ke haifarwa.

Sigar Samfurin:

Sigar tiren yumbu na silicon carbide:

(Kayan aiki)		(Naúrar)	(ssic)
(Abubuwan da ke cikin SiC)		(Wt)%	>99
(Matsakaicin girman hatsi)		micron	4-10
(Yawa)		kg/dm3	>3.14
(A bayyane yake cewa akwai ramuka)		Vo1%	<0.5
(Taurin Vickers)	HV 0.5	GPA	28
() Ƙarfin lankwasawa (maki uku)	20ºC	MPa	450
(Ƙarfin matsi)	20ºC	MPa	3900
(Modulus mai sassauƙa)	20ºC	GPA	420
(Turi na karaya)		MPa/m'%	3.5
(Mai jure zafi)	20°C	W/(m*K)	160
(Juriya)	20°C	Ohm.cm	106-108
(Ma'aunin faɗaɗa zafi)	a(RT**...80ºC)	K-1*10-6	4.3
(Matsakaicin zafin aiki)		oºC	1700

Sigar bututun yumbu na silicon carbide:

Abubuwa	Fihirisa
α-SIC	Minti 99%
Bayyanannen Porosity	matsakaicin kashi 16%
Yawan Yawa	2.7g/cm3 min
Ƙarfin lanƙwasawa a Babban Zafin Jiki	100 Mpa min
Ma'aunin Faɗaɗawar Zafi	K-1 4.7x10 -6
Ma'aunin Ma'aunin Zafin Jiki (1400ºC)	24 W/mk
Matsakaicin Zafin Aiki	1650ºC

Babban aikace-aikace:

1. Farantin yumbu na silicon carbide
- Yankewa da gogewa da Wafer: yana aiki a matsayin dandamalin ɗaukar kaya don tabbatar da daidaito da kwanciyar hankali yayin yankewa da gogewa.
- Tsarin Lithography: An sanya wafer ɗin a cikin injin lithography don tabbatar da daidaiton wurin da aka sanya shi yayin fallasa.
- Gilashin Injin Sinadarai (CMP): yana aiki a matsayin dandamalin tallafi don goge kushin, yana samar da matsin lamba iri ɗaya da rarraba zafi.
2. Bututun yumbu na silicon carbide
- Bututun tanderu mai zafi: ana amfani da shi don kayan aikin zafi mai zafi kamar tanderun watsawa da tanderun oxidation don ɗaukar wafers don maganin zafin jiki mai zafi.
- Tsarin CVD/PVD: A matsayin bututun ɗaukar kaya a cikin ɗakin amsawa, mai jure yanayin zafi mai yawa da iskar gas mai lalata.
- Kayan haɗin kayan aikin Semiconductor: don masu musayar zafi, bututun iskar gas, da sauransu, don inganta ingancin sarrafa zafi na kayan aiki.
XKH tana ba da cikakken sabis na musamman don tiren yumbu na silicon carbide, kofunan tsotsa da bututun yumbu na silicon carbide. Tiren yumbu na silicon carbide da kofunan tsotsa, ana iya keɓance XKH bisa ga buƙatun abokin ciniki na girma dabam-dabam, siffofi da ƙaiƙayi daban-daban na saman, kuma tana tallafawa maganin shafawa na musamman, haɓaka juriyar lalacewa da juriyar tsatsa; Ga bututun yumbu na silicon carbide, XKH na iya keɓance nau'ikan diamita na ciki, diamita na waje, tsayi da tsari mai rikitarwa (kamar bututu mai siffa ko bututun rami), da kuma samar da gogewa, murfin hana iskar shaka da sauran hanyoyin magance saman. XKH yana tabbatar da cewa abokan ciniki za su iya cin gajiyar fa'idodin aikin samfuran yumbu na silicon carbide don biyan buƙatun buƙatun manyan fannoni na masana'antu kamar semiconductors, leds da photovoltaics.