Farantin yumbu/tire na SiC don mai riƙe wafer mai inci 4 mai inci 6 don ICP

Farantin/tire na yumbu na SiC don mai riƙe wafer mai inci 4 mai inci 6 don ICP Hoton da aka Fito

Takaitaccen Bayani:

Farantin yumbu na SiC wani abu ne mai matuƙar aiki wanda aka ƙera daga Silicon Carbide mai tsafta, wanda aka ƙera don amfani a cikin yanayin zafi, sinadarai, da na inji mai tsanani. An san shi da tauri, ƙarfin zafinsa, da juriyarsa ga tsatsa, ana amfani da farantin SiC sosai a matsayin mai ɗaukar wafer, mai hana ruwa, ko ɓangaren tsari a masana'antar semiconductor, LED, photovoltaic, da sararin samaniya.

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Siffofi

SiC farantin yumbu Takaitaccen bayani

Tare da kyakkyawan kwanciyar hankali na zafi har zuwa 1600°C da kuma kyakkyawan juriya ga iskar gas mai amsawa da muhallin plasma, farantin SiC yana tabbatar da aiki mai kyau yayin ayyukan cirewa, adanawa, da yaɗuwa a yanayin zafi mai zafi. Tsarinsa mai yawa, mara ramuka yana rage samar da ƙwayoyin cuta, wanda hakan ya sa ya dace da amfani da shi a cikin injin tsabtace gida ko kuma a cikin ɗakin tsaftacewa.

Aikace-aikacen farantin yumbu na SiC

1. Masana'antar Semiconductor

Ana amfani da faranti na yumbu na SiC a matsayin masu ɗaukar wafer, masu hana ruwa gudu, da faranti masu tsayi a cikin kayan aikin ƙera semiconductor kamar CVD (Simical Vapor Deposition), PVD (Physical Vapor Deposition), da tsarin etching. Kyakkyawan tasirin zafi da ƙarancin faɗaɗa zafi suna ba su damar kiyaye rarrabawar zafin jiki iri ɗaya, wanda yake da mahimmanci don sarrafa wafer mai inganci. Juriyar SiC ga iskar gas da plasma mai lalata yana tabbatar da dorewa a cikin mawuyacin yanayi, yana taimakawa rage gurɓatar barbashi da kula da kayan aiki.

2. Masana'antar LED - Sassaka ICP

A fannin kera LED, faranti na SiC sune manyan abubuwan da ke cikin tsarin etching na ICP (Inductively Coupled Plasma). Suna aiki a matsayin masu riƙe wafer, suna samar da dandamali mai ƙarfi da ƙarfi don tallafawa wafers na sapphire ko GaN yayin sarrafa plasma. Kyakkyawan juriyarsu ga plasma, madaidaicin saman su, da kwanciyar hankali na girma suna taimakawa wajen tabbatar da daidaito da daidaiton etching, wanda ke haifar da ƙaruwar yawan amfanin ƙasa da aikin na'urori a cikin kwakwalwan LED.

3. Na'urorin ɗaukar hoto (PV) da makamashin hasken rana

Ana kuma amfani da faranti na yumbu na SiC wajen samar da ƙwayoyin hasken rana, musamman a lokacin da ake amfani da su wajen yin sintering da kuma rage zafi. Rashin ƙarfinsu a yanayin zafi mai yawa da kuma ikonsu na tsayayya da warping suna tabbatar da cewa ana sarrafa wafers na silicon akai-akai. Bugu da ƙari, ƙarancin haɗarin gurɓatawa yana da mahimmanci don kiyaye ingancin ƙwayoyin photovoltaic.

SiC farantin yumbu Properties

1. Ƙarfin Inji da Tauri Mai Kyau

Farantin yumbu na SiC suna nuna ƙarfin injina sosai, tare da ƙarfin lanƙwasa na yau da kullun wanda ya wuce 400 MPa da taurin Vickers wanda ya kai sama da 2000 HV. Wannan yana sa su kasance masu juriya ga lalacewa ta inji, gogewa, da nakasa, wanda ke tabbatar da tsawon rai na aiki koda a ƙarƙashin babban kaya ko kuma zagayowar zafi mai maimaitawa.

2. Babban ƙarfin wutar lantarki mai zafi

SiC yana da kyakkyawan yanayin zafi (yawanci 120-200 W/m·K), wanda ke ba shi damar rarraba zafi daidai a saman sa. Wannan ka'ida tana da mahimmanci a cikin matakai kamar etching wafer, deposition, ko sintering, inda daidaiton zafin jiki ke shafar yawan amfanin samfur da inganci kai tsaye.

3. Ingantaccen Tsarin Zafi

Tare da babban wurin narkewa (2700°C) da ƙarancin yawan faɗaɗa zafi (4.0 × 10⁻⁶/K), faranti na yumbu na SiC suna kiyaye daidaiton girma da daidaiton tsari a ƙarƙashin saurin zagayowar dumama da sanyaya. Wannan ya sa suka dace da amfani a cikin tanderun zafi mai zafi, ɗakunan injinan iska, da muhallin plasma.

Kayayyakin Fasaha
Fihirisa	Naúrar	darajar
Sunan Kayan Aiki		Reaction Sintered Silicon Carbide	Sintered Silicon Carbide mara matsa lamba	Sake yin amfani da Silicon Carbide
Tsarin aiki		RBSiC	SSiC	R-SiC
Yawan Yawa	g/cm3	3	3.15 ± 0.03	2.60-2.70
Ƙarfin Lankwasawa	MPa (kpsi)	338(49)	380(55)	80-90 (20°C) 90-100(1400°C)
Ƙarfin Matsi	MPa (kpsi)	1120(158)	3970(560)	> 600
Tauri	Knoop	2700	2800	/
Karya Tsayin Daka	MPa m1/2	4.5	4	/
Tsarin kwararar zafi	W/mk	95	120	23
Ma'aunin Faɗaɗawar Zafi	10^-6.1/°C	5	4	4.7
Takamaiman Zafi	Joule/g 0k	0.8	0.67	/
Mafi girman zafin jiki a iska	℃	1200	1500	1600
Modulus mai laushi	Gpa	360	410	240

Tambaya da Amsa na farantin yumbu na SiC

T: Menene halayen farantin silicon carbide?

A: Faranti na silicon carbide (SiC) an san su da ƙarfi, tauri, da kwanciyar hankali na zafi. Suna ba da kyakkyawan yanayin zafi da ƙarancin faɗaɗa zafi, suna tabbatar da ingantaccen aiki a ƙarƙashin yanayin zafi mai tsanani. SiC kuma ba shi da sinadarai, yana jure wa acid, alkalis, da muhallin plasma, wanda hakan ya sa ya dace da sarrafa semiconductor da LED. Faɗinsa mai yawa da santsi yana rage samar da barbashi, yana kiyaye jituwa da ɗakin tsabta. Ana amfani da faranti na SiC sosai a matsayin masu ɗaukar wafer, masu hana ruwa, da kuma abubuwan tallafi a cikin yanayin zafi mai yawa da lalata a cikin masana'antar semiconductor, photovoltaic, da sararin samaniya.