SiC Ceramic Fork Arm / End Effector - Babban Madaidaicin Gudanarwa don Masana'antar Semiconductor
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Bayanin Samfura

SiC Ceramic Fork Arm, sau da yawa ana kiranta da Ƙarshen Ƙarshen Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararrun Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwararren Ƙwaƙwalwa na Ƙaƙwalwa na Ƙaƙwalwa na Ƙaƙwal ) , wanda aka ƙera musamman don jigilar wafer, daidaitawa, da matsayi a cikin manyan masana'antu na fasaha, musamman a cikin semiconductor da kuma samar da hotovoltaic. Ƙirƙira ta amfani da yumbun silikon carbide mai tsafta, wannan ɓangaren ya haɗu da ƙarfin injina na musamman, haɓaka ƙarancin zafi mai ƙarancin ƙarfi, da juriya mai ƙarfi ga girgiza zafin zafi da lalata.
Ba kamar na gargajiya na ƙarshe na al'ada da aka yi daga aluminum, bakin karfe, ko ma ma'adini ba, SiC ceramic end effectors suna ba da aikin da bai dace ba a cikin ɗakuna masu tsabta, dakunan tsabta, da yanayin sarrafawa mai tsauri, yana mai da su wani muhimmin ɓangare na robots na sarrafa wafer na gaba. Tare da karuwar buƙatun samar da ba tare da gurɓatawa ba da ƙarin juriya a cikin guntuwar guntu, amfani da abubuwan da ke haifar da ƙarshen yumbu yana zama cikin sauri ma'aunin masana'antu.
Ƙa'idar Manufacturing
ƘirƙirarSiC Ceramic End Effectorsya ƙunshi jerin madaidaicin madaidaicin matakai masu tsabta waɗanda ke tabbatar da aiki da dorewa. Ana amfani da manyan matakai guda biyu:
Silicon Carbide (RB-SiC) Mai Ratsawa
A cikin wannan tsari, preform ɗin da aka yi daga silicon carbide foda da ɗaure ana shigar da shi tare da narkakkar siliki a yanayin zafi mai girma (~ 1500 ° C), wanda ke amsawa tare da ragowar carbon don samar da ƙaƙƙarfan SiC-Si composite. Wannan hanyar tana ba da ingantaccen iko mai ƙima kuma yana da tasiri mai tsada don samarwa mai girma.
Sintered Silicon Carbide (SSiC) mara ƙarfi
Ana yin SSiC ta hanyar siyar da ultra-lafiya, tsaftataccen SiC foda a matsanancin yanayin zafi (> 2000 ° C) ba tare da amfani da ƙari ko wani lokaci mai ɗauri ba. Wannan yana haifar da samfur mai kusan 100% yawa da mafi girman kayan inji da kayan zafi da ake samu tsakanin kayan SiC. Yana da manufa don aikace-aikacen sarrafa wafer mai mahimmanci.
Bayan-Processing
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Daidaitaccen CNC Machining: Ya sami babban flatness da kuma daidaici.
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Ƙarshen Sama: Lu'u lu'u-lu'u polishing yana rage rashin ƙarfi zuwa <0.02 µm.
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Dubawa: Ana amfani da interferometry na gani, CMM, da gwaji marasa lalacewa don tabbatar da kowane yanki.
Wadannan matakan tabbatar da cewaSiC karshen sakamakoyana isar da daidaitattun jeri na wafer daidaito, kyakkyawan tsari, da ƙaramar tsarar ɓangarorin.
Key Features da Fa'idodi
Siffar | Bayani |
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Ultra-High Hardness | Vickers taurin> 2500 HV, juriya lalacewa da chipping. |
Ƙarƙashin Ƙarfafawar thermal | CTE ~ 4.5×10⁻⁶/K, yana ba da damar kwanciyar hankali a cikin hawan keke. |
Sinadarin rashin kuzari | Mai jure wa HF, HCl, gas ɗin plasma, da sauran abubuwan lalata. |
Kyakkyawan Juriya na Shock Thermal | Ya dace da saurin dumama / sanyaya a cikin injin injin da kuma tsarin murhu. |
Babban Rigidity da Ƙarfi | Yana goyan bayan dogon hannun cokali mai yatsu ba tare da karkata ba. |
Low Outgassing | Mafi dacewa don mahalli mai matsananciyar matsananci (UHV). |
ISO Class 1 Tsabtace Tsabtace | Ayyukan da ba su da barbashi yana tabbatar da amincin wafer. |
Aikace-aikace
SiC Ceramic Fork Arm / End Effector ana amfani dashi sosai a cikin masana'antu waɗanda ke buƙatar matsananciyar daidaito, tsabta, da juriya na sinadarai. Mahimman yanayin aikace-aikacen sun haɗa da:
Semiconductor Manufacturing
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Wafer loading/unloading in deposition (CVD, PVD), etching (RIE, DRIE), da tsarin tsaftacewa.
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Jirgin robotic wafer tsakanin FOUPs, kaset, da kayan aikin sarrafawa.
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Ma'aunin zafi da zafi lokacin sarrafa zafi ko annealing.
Samar da Salon Hoto
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Ɗaukar daɗaɗɗen safarar wafern siliki mai rauni ko kayan aikin hasken rana a cikin layi mai sarrafa kansa.
Flat Panel Nuni (FPD) Masana'antu
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Matsar da manyan ginshiƙan gilashi ko abubuwan da ake amfani da su a cikin wuraren samar da OLED/LCD.
Compound Semiconductor / MEMS
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Ana amfani da shi a cikin GaN, SiC, da layin ƙirƙira MEMS inda sarrafa gurɓatawa da daidaiton matsayi ke da mahimmanci.
Matsayinsa na ƙarshe yana da mahimmanci musamman don tabbatar da rashin lahani, karkowar kulawa yayin ayyuka masu mahimmanci.
Ƙarfafa Ƙarfafawa
Muna ba da gyare-gyare mai yawa don saduwa da kayan aiki daban-daban da bukatun tsari:
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Tsarin cokali mai yatsu: Tsare-tsare-tsalle-tsalle-tsalle-tsalle-tsalle-tsalle-tsalle-tsalle-tsa-biyu,yatsu-yatsu-yawa-ya-yatsa.
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Daidaiton Girman Wafer: daga 2" zuwa 12" wafers.
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Hanyoyin Haɗawa: Mai jituwa tare da OEM robotic makamai.
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Kauri & Haƙuri na Sama: Micron-levelness da zagaye zagaye akwai.
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Siffofin Anti-Slip: Zaɓan launi na zaɓi ko sutura don amintaccen rikon wafer.
Kowanneyumbu karshen sakamakoan tsara shi tare da abokan ciniki don tabbatar da dacewa daidai tare da ƙananan canje-canjen kayan aiki.
Tambayoyin da ake yawan yi (FAQ)
Q1: Ta yaya SiC ya fi ma'adini don aikace-aikacen sakamako na ƙarshe?
A1:Yayin da ake yawan amfani da ma'adini don tsabtarsa, ba shi da ƙarfin injin kuma yana da saurin karyewa a ƙarƙashin kaya ko girgiza zafin jiki. SiC yana ba da ƙarfi mafi girma, juriya, da kwanciyar hankali na zafi, yana rage haɗarin raguwa da lalacewar wafer.
Q2: Shin wannan hannun cokali mai yatsu ya dace da duk masu sarrafa wafer na robot?
A2:Ee, masu aikin ƙarshen yumbu na mu sun dace da mafi yawan manyan tsarin sarrafa wafer kuma ana iya daidaita su zuwa takamaiman nau'ikan na'ura na robotic tare da madaidaicin zanen injiniya.
Q3: Shin zai iya ɗaukar wafers 300 mm ba tare da warping ba?
A3:Lallai. Babban tsauri na SiC yana ba da damar ko da bakin ciki, dogon cokali mai yatsu don riƙe wafers na mm 300 amintattu ba tare da sagging ko jujjuya ba yayin motsi.
Q4: Menene rayuwar sabis na yau da kullun na SiC ceramic end effector?
A4:Tare da amfani mai kyau, mai amfani da ƙarshen SiC zai iya wuce 5 zuwa 10 sau fiye da ma'adini na al'ada ko nau'in aluminum, godiya ga kyakkyawan juriya ga zafi da damuwa na inji.
Q5: Kuna ba da sauyawa ko sabis na samfur na sauri?
A5:Ee, muna goyan bayan samar da samfur mai sauri kuma muna ba da sabis na maye gurbin dangane da zane-zane na CAD ko juzu'in injiniyoyi daga kayan aikin da ake dasu.
Game da Mu
XKH ya ƙware a cikin haɓaka fasahar fasaha, samarwa, da tallace-tallace na gilashin gani na musamman da sabbin kayan kristal. Kayayyakinmu suna hidimar kayan lantarki na gani, na'urorin lantarki na mabukaci, da sojoji. Muna ba da abubuwan haɗin gani na Sapphire, murfin ruwan tabarau na wayar hannu, Ceramics, LT, Silicon Carbide SIC, Quartz, da wafers kristal semiconductor. Tare da ƙwararrun ƙwararrun ƙwararrun ƙwararrun ƙwararrun kayan aiki, mun yi fice a cikin sarrafa samfuran da ba daidai ba, da nufin zama babban kamfani na kayan fasaha na optoelectronic.
