Wafer na LNOI (Lithium Niobate akan Insulator) Sadarwa Mai Sanin Babban Electro-Optic
Cikakken Zane
Bayani
A cikin akwatin wafer akwai ramuka masu daidaito, waɗanda girmansu iri ɗaya ne don tallafawa ɓangarorin biyu na wafer. Akwatin lu'ulu'u gabaɗaya an yi shi ne da kayan PP mai haske wanda ke jure yanayin zafi, lalacewa da wutar lantarki mai tsauri. Ana amfani da launuka daban-daban na ƙari don bambance sassan aikin ƙarfe a cikin samar da semiconductor. Saboda ƙaramin girman maɓallin semiconductor, alamu masu yawa, da buƙatun girman barbashi masu tsauri a cikin samarwa, dole ne a tabbatar da akwatin wafer yana da yanayi mai tsabta don haɗawa da ramin amsawar akwatin microenvironment na injunan samarwa daban-daban.
Hanyar Ƙirƙira
Ƙirƙirar wafers na LNOI ya ƙunshi matakai da dama daidai:
Mataki na 1: Dasa Helium IonAna shigar da ions na helium cikin babban lu'ulu'u na LN ta amfani da na'urar dasa ions. Waɗannan ions suna zama a wani zurfin da ya dace, suna samar da wani jirgin da ya raunana wanda daga ƙarshe zai sauƙaƙa rabuwar fim ɗin.
Mataki na 2: Tsarin Tushe na ƘasaAna haɗa wani silikon ko LN wafer daban da SiO2 ta amfani da PECVD ko thermal oxidation. An yi amfani da saman samansa don haɗa shi da kyau.
Mataki na 3: Haɗa LN zuwa SubstrateAna juya lu'ulu'u na LN da aka dasa a ion sannan a haɗa shi da tushe ta amfani da haɗin wafer kai tsaye. A wuraren bincike, ana iya amfani da benzocyclobutene (BCB) a matsayin manne don sauƙaƙe haɗin gwiwa a ƙarƙashin yanayi mara tsauri.
Mataki na 4: Maganin Zafi da Rabuwar FimZubar da ruwa yana kunna samuwar kumfa a zurfin da aka dasa, wanda ke ba da damar raba siririn fim (layin LN na sama) daga babban abu. Ana amfani da ƙarfin injina don kammala fitar da shi.
Mataki na 5: Goge samanAna amfani da Sinadaran Manhaja (CMP) don laushi saman saman LN, inganta ingancin gani da yawan amfanin na'urar.
Sigogi na Fasaha
| Kayan Aiki | Na gani Matsayi LiNbO3 wafe-wafe (Fari or Baƙi) | |
| Curie Zafi | 1142±0.7℃ | |
| Yankan Kusurwoyi | X/Y/Z da sauransu | |
| Diamita/girma | 2”/3”/4” ±0.03mm | |
| Tol(±) | <0.20 mm ±0.005mm | |
| Kauri | 0.18 ~ 0.5mm ko fiye | |
| Babban Firamare Flat | 16mm/22mm/32mm | |
| TTV | <3μm | |
| Rukayya | -30 | |
| Warp | <40μm | |
| Hanya Flat | Duk akwai su | |
| saman Nau'i | An goge Gefe ɗaya (SSP)/Gege biyu (DSP) | |
| An goge gefe Ra | <0.5nm | |
| S/D | 20/10 | |
| Gefen Sharuɗɗa | R=0.2mm Nau'in C or Hancin bull | |
| Inganci | Kyauta of fashewa (kumfa kuma haɗaka) | |
| Na gani an shaƙa | Magnesium/Fe/Zn/MgO da sauransu don na gani maki LN wafers kowace an nema | |
| Wafer mai wafer saman Sharuɗɗa | Ma'aunin haske | A'a=2.2878/Ne=2.2033 @632nm hanyar haɗin igiyar ruwa/prism. |
| Gurɓatawa, | Babu | |
| Barbashi c>0.3μ m | <=30 | |
| Karce, Cire | Babu | |
| Lalacewa | Babu fasawa, ƙazanta, alamun gogewa, da tabo | |
| Marufi | Adadi/Akwatin Wafer | Kwalaye 25 a kowace akwati |
Amfani da Layuka
Saboda sauƙin amfani da aiki da kuma sauƙin amfani, ana amfani da LNOI a masana'antu da dama:
Na'urorin Photonics:Ƙananan na'urori masu daidaita sauti, multiplexers, da kuma da'irori masu ɗaukar hoto.
RF/Acoustics:Masu daidaita Acousto-optic, matatun RF.
Kwamfuta Mai Kwatantawa:Masu haɗa mitar da ba su da layi da kuma masu samar da na'urorin haɗa photon.
Tsaro & Tashar Jiragen Sama:Na'urorin hangen nesa masu ƙarancin asara, da na'urorin canza mita.
Na'urorin Lafiya:Na'urorin hangen nesa na gani da kuma na'urorin binciken sigina masu yawan mita.
Tambayoyin da ake yawan yi akai-akai
T: Me yasa aka fi fifita LNOI akan SOI a tsarin gani?
A:LNOI yana da ingantattun ma'aunin electro-optic da kuma faffadan kewayon bayyanannu, wanda ke ba da damar yin aiki mafi kyau a cikin da'irorin photonic.
T: Shin CMP dole ne bayan rabuwa?
A:Eh. Faɗin LN da aka fallasa yana da tauri bayan an yanke ion kuma dole ne a goge shi don ya dace da ƙayyadaddun yanayin gani.
T: Menene matsakaicin girman wafer da ake da shi?
A:Wafers na LNOI na kasuwanci galibi suna da inci 3 da 4, kodayake wasu masu samar da kayayyaki suna haɓaka nau'ikan 6".
T: Za a iya sake amfani da layin LN bayan rabuwa?
A:Ana iya sake gogewa da kuma sake amfani da lu'ulu'u na asali sau da yawa, kodayake ingancin na iya raguwa bayan zagayowar da yawa.
T: Shin wafers ɗin LNOI sun dace da sarrafa CMOS?
A:Eh, an tsara su ne don su dace da tsarin ƙera semiconductor na gargajiya, musamman lokacin da ake amfani da substrates na silicon.
