8inch LNOI (LiNbO3 akan Insulator) Wafer don Na'urar Modulator Waveguides Haɗaɗɗen da'irori
Cikakken zane
Gabatarwa
Lithium Niobate akan Insulator (LNOI) wafers abu ne mai yanke-yanke da ake amfani da shi a cikin manyan aikace-aikacen gani da lantarki daban-daban. Ana samar da waɗannan wafers ta hanyar canja wurin bakin bakin ciki Layer na lithium niobate (LiNbO₃) zuwa kan abin rufe fuska, yawanci silicon ko wani abu mai dacewa, ta amfani da ingantattun dabaru kamar ion implantation da wafer bonding. Fasahar LNOI tana raba kamanceceniya da yawa tare da Silicon on Insulator (SOI) fasahar wafer amma yana amfani da fa'ida daga keɓaɓɓen kaddarorin gani na lithium niobate, wani abu da aka sani don piezoelectric, pyroelectric, da halayen gani marasa kan layi.
Wafers na LNOI sun sami kulawa mai mahimmanci a fagage kamar haɗaɗɗen na'urorin gani, sadarwa, da ƙididdige ƙididdigewa saboda babban aikinsu a cikin aikace-aikacen mitoci da sauri. Ana samar da wafers ta hanyar amfani da dabarar "Smart-cut", wanda ke ba da damar sarrafa daidaitaccen kaurin fim ɗin lithium niobate na bakin ciki, yana tabbatar da wafers sun cika ƙayyadaddun da ake buƙata don aikace-aikace daban-daban.
Ka'ida
Tsarin ƙirƙirar wafers na LNOI yana farawa da babban lithium niobate crystal. crystal yana jure wa ion implantation, inda aka shigar da helium ions masu ƙarfi a cikin saman kristal lithium niobate. Wadannan ions suna shiga cikin kristal zuwa wani zurfin zurfi kuma suna rushe tsarin crystal, suna ƙirƙirar jirgin sama mara ƙarfi wanda daga baya za'a iya amfani da shi don raba crystal zuwa yadudduka na bakin ciki. Takamammen makamashi na ion helium yana sarrafa zurfin dasawa, wanda kai tsaye yana tasiri kauri na ƙarshen lithium niobate Layer.
Bayan dasa ion, kristal lithium niobate yana haɗe zuwa wani abu ta hanyar amfani da dabarar da ake kira wafer bonding. Tsarin haɗin kai yawanci yana amfani da hanyar haɗin kai kai tsaye, inda saman biyu (wanda aka dasa lithium niobate crystal da ion da aka dasa) ana matse su tare a ƙarƙashin matsanancin zafin jiki da matsa lamba don ƙirƙirar haɗin gwiwa mai ƙarfi. A wasu lokuta, ana iya amfani da kayan manne kamar benzocyclobutene (BCB) don ƙarin tallafi.
Bayan haɗawa, wafer ɗin yana yin aikin cirewa don gyara duk wani lahani da ion ɗin ya haifar da haɓaka haɗin gwiwa tsakanin yadudduka. Har ila yau, tsarin cirewa yana taimakawa Layer lithium niobate na bakin ciki don cirewa daga ainihin crystal, yana barin bayan sirara, ingantaccen Layer na lithium niobate wanda za'a iya amfani dashi don ƙirƙira na'urar.
Ƙayyadaddun bayanai
Wafers na LNOI suna da ƙayyadaddun ƙayyadaddun bayanai da yawa waɗanda ke tabbatar da dacewarsu don aikace-aikacen babban aiki. Waɗannan sun haɗa da:
Ƙayyadaddun kayan aiki;
| ;Material; | ;Ƙayyadaddun bayanai; |
| Kayan abu | Homogeneous: LiNbO3 |
| Ingancin kayan abu | Kumfa ko hadawa <100μm |
| Gabatarwa | Y-yanke ± 0.2° |
| Yawan yawa | 4.65 g/cm³ |
| Curie Zazzabi | 1142 ± 1 ° C |
| Bayyana gaskiya | > 95% a cikin kewayon 450-700 nm (kauri 10 mm) |
Ƙayyadaddun Ƙira;
| ;Parameter; | ;Ƙayyadaddun bayanai; |
| Diamita | 150mm ± 0.2 mm |
| Kauri | 350 μm ± 10 μm |
| Lalata | <1.3m |
| Jimlar Bambancin Kauri (TTV) | Warp <70 μm @ 150 mm wafer |
| Bambancin Kauri na Gida (LTV) | <70 μm @ 150 mm wafer |
| Tashin hankali | Rq ≤0.5 nm (ƙimar AFM RMS) |
| ingancin saman | 40-20 |
| Barbashi (Ba za a iya cirewa ba) | 100-200 μm ≤3 barbashi |
| Chips | <300 μm (cikakken wafer, babu yankin keɓe) |
| Karas | Babu fasa (cikakken wafer) |
| Lalacewa | Babu tabo mara cirewa (cikakken wafer) |
| Daidaituwa | <30 seconds |
| Jirgin Tunanin Hankali (X-axis) | 47 ± 2 mm |
Aikace-aikace
Ana amfani da wafers na LNOI a cikin aikace-aikace da yawa saboda ƙayyadaddun kaddarorin su, musamman a fagen fasahar hoto, sadarwa, da fasahar ƙididdiga. Wasu daga cikin mahimman aikace-aikacen sun haɗa da:
Haɗaɗɗen Na'urorin gani:Ana amfani da wafers na LNOI sosai a cikin haɗaɗɗun da'irori na gani, inda suke ba da damar manyan na'urori na hoto kamar su masu daidaitawa, waveguides, da resonators. Babban abubuwan gani marasa kan layi na lithium niobate sun sa ya zama kyakkyawan zaɓi don aikace-aikacen da ke buƙatar ingantaccen magudin haske.
Sadarwa:Ana amfani da wafers na LNOI a cikin masu daidaitawa na gani, waɗanda ke da mahimman abubuwan haɗin gwiwa a cikin tsarin sadarwa mai sauri, gami da hanyoyin sadarwar fiber optic. Ƙarfin daidaita haske a manyan mitoci ya sa wafers na LNOI ya dace don tsarin sadarwar zamani.
Ƙididdigar Ƙididdigar Ƙididdiga:A cikin fasahar ƙididdigewa, ana amfani da wafers na LNOI don ƙirƙira abubuwan haɗin kai don kwamfutocin ƙididdiga da tsarin sadarwa na ƙididdigewa. Ana amfani da kaddarorin gani marasa kan layi na LNOI don ƙirƙirar nau'i-nau'i na photon, waɗanda ke da mahimmanci don rarraba maɓalli na ƙididdigewa da ƙididdigar ƙididdiga.
Sensors:Ana amfani da wafers na LNOI a aikace-aikace na ji daban-daban, gami da na'urori masu auna gani da sauti. Ƙarfinsu don yin hulɗa tare da haske da sauti yana sa su zama masu dacewa don nau'ikan fasahar ji daban-daban.
FAQ
Q:Menene fasahar LNOI?
A: Fasahar LNOI ta haɗa da canja wurin fim ɗin lithium niobate na bakin ciki zuwa wani abin rufe fuska, yawanci silicon. Wannan fasaha tana yin amfani da keɓaɓɓen kaddarorin lithium niobate, kamar manyan halayensa na gani mara kyau, piezoelectricity, da pyroelectricity, yana mai da shi manufa don haɗaɗɗen kayan gani da sadarwa.
Q:Menene bambanci tsakanin wafers na LNOI da SOI?
A: Dukansu wafers na LNOI da SOI sunyi kama da cewa sun ƙunshi wani bakin ciki Layer na kayan da aka ɗaure zuwa wani abu. Koyaya, wafers na LNOI suna amfani da lithium niobate azaman kayan fim na bakin ciki, yayin da wafers na SOI ke amfani da silicon. Bambanci mai mahimmanci ya ta'allaka ne a cikin kaddarorin kayan fim na bakin ciki, tare da LNOI yana ba da ingantattun kaddarorin gani da piezoelectric.
Q:Menene fa'idodin amfani da wafers na LNOI?
A: Babban fa'idodin wafers na LNOI sun haɗa da kyawawan kaddarorinsu na gani, kamar manyan ma'aunin gani mara tushe, da ƙarfin injin su. Waɗannan halayen sun sa wafers na LNOI ya dace don amfani da su a cikin babban sauri, mai girma, da aikace-aikacen ƙira.
Q:Za a iya amfani da wafers na LNOI don aikace-aikacen ƙididdiga?
A: Ee, ana amfani da wafers na LNOI sosai a cikin fasahar ƙididdigewa saboda iyawarsu ta samar da nau'ikan photon masu kama da juna da kuma dacewarsu tare da hadedde photonics. Waɗannan kaddarorin suna da mahimmanci ga aikace-aikace a cikin ƙididdigar ƙididdiga, sadarwa, da cryptography.
Q:Menene girman kauri na fina-finan LNOI?
A: Fina-finan LNOI yawanci kewayo daga ƴan nanometer ɗari zuwa ɗimbin micrometers a cikin kauri, ya danganta da takamaiman aikace-aikacen. Ana sarrafa kauri yayin aiwatar da ion.
