Injin gogewa na Ion Beam don sapphire SiC Si

Takaitaccen Bayani:

Injin Ɗaukar Hoto da Gogewa na Ion Beam ya dogara ne akan ƙa'idar ion sputtering. A cikin ɗakin da ke da iska mai ƙarfi, tushen ion yana samar da plasma, wanda ke hanzarta zuwa ga hasken ion mai ƙarfi. Wannan hasken yana mamaye saman ɓangaren gani, yana cire kayan da ke ma'aunin atomic don cimma daidaiton gyara da kammala saman.


Siffofi

Bayanin Samfurin Injin Gina Gilashin Ion Beam

Injin Ɗaukar Hoto da Gogewa na Ion Beam ya dogara ne akan ƙa'idar ion sputtering. A cikin ɗakin da ke da iska mai ƙarfi, tushen ion yana samar da plasma, wanda ke hanzarta zuwa ga hasken ion mai ƙarfi. Wannan hasken yana mamaye saman ɓangaren gani, yana cire kayan da ke ma'aunin atomic don cimma daidaiton gyara da kammala saman.

A matsayin tsari mara hulɗa, gogewar hasken ion yana kawar da damuwa ta injiniya kuma yana guje wa lalacewar ƙasa, wanda hakan ya sa ya dace da ƙera na'urori masu auna haske masu inganci waɗanda ake amfani da su a fannin ilmin taurari, sararin samaniya, semiconductor, da aikace-aikacen bincike na ci gaba.

Ka'idar Aiki na Injin Gina Gilashin Ion

Samar da Ion
Ana shigar da iskar gas mara aiki (misali, argon) cikin ɗakin injin sannan a haɗa shi da ion ta hanyar fitar da wutar lantarki don samar da plasma.

Tsarin Hanzari da Haske
Ana hanzarta ions ɗin zuwa ɗaruruwan ko dubban volts na electron (eV) kuma an tsara su zuwa wuri mai santsi, mai mayar da hankali kan haske.

Cire Kayan
Hasken ion ɗin yana fitar da ƙwayoyin halitta daga saman ba tare da fara haɗakar sinadarai ba.

Gano Kuskure & Tsarin Hanya
Ana auna karkacewar siffar saman da interferometry. Ana amfani da ayyukan cirewa don tantance lokutan zama da kuma samar da ingantattun hanyoyin kayan aiki.

Gyaran Rufe-Madauki
Ana ci gaba da maimaita zagayowar sarrafawa da aunawa har sai an cimma maƙasudin daidaiton RMS/PV.

Mahimman Sifofi na Injin Gina Ion Beam

Daidaitawar Sufuri ta Duniya- Yana sarrafa saman lebur, mai siffar ƙwallo, mai siffar aspheric, da kuma mai siffar freeformInjin goge ion beam 3

Matsakaicin Cirewa Mai Tsayi- Yana ba da damar gyara siffar sub-nanometer

Sarrafa Babu Lalacewa– Babu lahani ko canje-canje a ƙarƙashin ƙasa

Aiki Mai Daidaito- Yana aiki daidai gwargwado akan kayan da suka yi tauri daban-daban

Gyaran Mita Mai Ƙaranci/Matsakaici- Yana kawar da kurakurai ba tare da samar da kayan tarihi na matsakaici/mai girma ba

Ƙarancin Bukatar Kulawa- Dogon aiki mai ci gaba tare da ƙarancin lokacin hutu

Babban Bayani na Fasaha na Injin Gina Gilashin Ion Beam

Abu

Ƙayyadewa

Hanyar Sarrafawa Iskar ion a cikin yanayi mai zafi
Nau'in Sarrafawa Siffar saman da ba ta taɓawa da gogewa
Girman Ma'aunin Aiki Mafi Girma Φ4000 mm
Gatari na Motsi Axis 3 / Axis 5
Kwanciyar Hankali daga Cirewa ≥95%
Daidaiton Fuskar PV < 10 nm; RMS ≤ 0.5 nm (yawancin RMS < 1 nm; PV < 15 nm)
Ƙarfin Gyaran Mita Yana cire kurakuran mita marasa ƙarfi-matsakaici ba tare da gabatar da kurakuran mita masu matsakaici/matsakaici ba
Ci gaba da Aiki Makonni 3-5 ba tare da gyara injin ba
Kudin Kulawa Ƙasa

Ƙarfin Sarrafa Injin Gilashin Ion Beam

Nau'in Fuskar da Aka Tallafa

Mai Sauƙi: Lebur, mai siffar ƙwallo, prism

Hadaddiyar Matsakaici: Aspher mai simita/rashin daidaituwa, aspher mai gefe-axis, silinda

Na Musamman: Na'urorin gani na musamman masu siriri, na'urorin gani na slat, na'urorin gani na hemispherical, na'urorin gani na conformal, faranti na lokaci, saman freeform

Kayan da aka Tallafa

Gilashin gani: Quartz, microcrystalline, K9, da sauransu.

Kayan Infrared: Silicon, germanium, da sauransu.

Karfe: Aluminum, bakin karfe, titanium gami, da sauransu.

Lu'ulu'u: YAG, silinon carbide mai lu'ulu'u ɗaya, da sauransu.

Kayan da ke da tauri/ƙari: Silicon carbide, da sauransu.

Ingancin Fuskar/Daidaitacce

PV < 10 nm

RMS ≤ 0.5 nm

Injin gogewa na Ion Beam 6
Injin goge ion beam 5

Nazarin Aiki na Injin Gina Gilashin Ion

Shari'a ta 1 - Madubi Mai Faɗi na yau da kullun

Kayan aiki: D630 mm mai faɗi mai faɗi

Sakamako: PV 46.4 nm; RMS 4.63 nm

 标准镜1

Shari'a ta 2 - Madubin Nunin X-ray

Kayan Aiki: 150 × 30 mm lebur ɗin silicon

Sakamako: PV 8.3 nm; RMS 0.379 nm; Gangara 0.13 µrad

x射线反射镜

 

Shari'a ta 3 - Madubin da ke Bayan Axis

Wurin Aiki: Madubin ƙasa mai kusurwa D326 mm

Sakamako: PV 35.9 nm; RMS 3.9 nm

离轴镜

Tambayoyin da ake yawan yi game da Gilashin Quartz

Tambayoyi da Amsoshi - Injin polishing na Ion Beam

Q1: Menene gogewar ion beam?
A1:Goge hasken ion wani tsari ne da ba ya taɓawa wanda ke amfani da hasken ion mai mayar da hankali (kamar ions na argon) don cire kayan daga saman aikin. Ana hanzarta ions ɗin kuma ana mayar da su zuwa saman, wanda ke haifar da cire kayan matakin atomic, wanda ke haifar da ƙarewa mai santsi sosai. Wannan tsari yana kawar da damuwa ta injiniya da lalacewar ƙasa, wanda hakan ya sa ya dace da daidaiton abubuwan gani.


Q2: Waɗanne nau'ikan saman za a iya aiwatar da Injin polishing na Ion Beam?
A2:TheInjin goge ion Beamzai iya sarrafa wurare daban-daban, gami da sassa masu sauƙi na gani kamarfilaye, ƙwallo, da kuma prism, da kuma siffofi masu rikitarwa kamaraspheres, aspheres na gefen-axis, kumasaman 'yantacceYana da tasiri musamman akan kayan aiki kamar gilashin gani, na'urorin gani na infrared, ƙarfe, da kayan aiki masu tauri/marasa ƙarfi.


T3: Waɗanne kayan aikin Injin goge Ion Beam zai iya aiki da su?
A3:TheInjin goge ion Beamzai iya goge nau'ikan kayan aiki iri-iri, gami da:

  • Gilashin gani: Quartz, microcrystalline, K9, da sauransu.

  • Kayan Infrared: Silikon, germanium, da sauransu.

  • Karfe: Aluminum, bakin karfe, titanium gami, da sauransu.

  • Kayan lu'ulu'u: YAG, silinon carbide mai lu'ulu'u ɗaya, da sauransu.

  • Sauran kayan aiki masu tauri/marasa ƙarfi: silicon carbide, da sauransu.

game da Mu

XKH ta ƙware a fannin haɓaka fasaha, samarwa, da kuma sayar da gilashin gani na musamman da sabbin kayan lu'ulu'u. Kayayyakinmu suna ba da kayan lantarki na gani, na'urorin lantarki na masu amfani, da kuma sojoji. Muna ba da kayan gani na Sapphire, murfin ruwan tabarau na wayar hannu, yumbu, LT, Silicon Carbide SIC, Quartz, da wafers na lu'ulu'u na semiconductor. Tare da ƙwarewa mai ƙwarewa da kayan aiki na zamani, mun yi fice a fannin sarrafa samfura marasa tsari, da nufin zama babban kamfanin fasahar zamani na kayan lantarki na optoelectronic.

7b504f91-ffda-4cff-9998-3564800f63d6

  • Na baya:
  • Na gaba:

  • Rubuta saƙonka a nan ka aika mana da shi