Wafers ɗin Quartz Mai Tsabta Mai Kyau don Semiconductor, Aikace-aikacen Haske na Photonics 2″4″6″8″12″
Cikakken Zane
Bayani na Gilashin Quartz
Wafers na Quartz suna samar da kashin bayan na'urori na zamani marasa adadi waɗanda ke jagorantar duniyar dijital ta yau. Daga kewayawa a cikin wayarku ta hannu zuwa kashin bayan tashoshin tushe na 5G, quartz a hankali yana isar da kwanciyar hankali, tsarki, da daidaito da ake buƙata a cikin kayan lantarki da na'urorin photonics masu aiki mai girma. Ko dai yana tallafawa da'irori masu sassauƙa, ko yana ba da damar na'urori masu auna MEMS, ko kuma shine tushen ƙirar quantum, halayen musamman na quartz sun sa ya zama dole a duk faɗin masana'antu.
"Fused Silica" ko "Fused Quartz" wanda shine matakin amorphous na quartz (SiO2). Idan aka kwatanta da gilashin borosilicate, fused silica ba shi da wani ƙari; don haka yana wanzuwa a cikin tsantsar siffarsa, SiO2. Fused silica yana da mafi girman watsawa a cikin infrared da ultraviolet spectrum idan aka kwatanta da gilashin yau da kullun. Fused silica ana samar da shi ta hanyar narkewa da sake ƙarfafa ultrapure SiO2. Fused silica na roba a gefe guda ana yin shi ne daga abubuwan da suka riga suka ƙunshi sinadarai masu arzikin silicon kamar SiCl4 waɗanda ake haƙa su sannan a yi musu oxidized a cikin yanayin H2 + O2. Ƙurar SiO2 da aka samar a wannan yanayin ana haɗa ta da silica akan wani abu. Ana yanke tubalan silica da aka haɗa zuwa wafers bayan haka ana goge wafers ɗin.
Muhimman Abubuwa da Fa'idodi na Wafer ɗin Gilashin Quartz
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Tsarkakakke Mai Tsabta (≥99.99% SiO2)
Ya dace da tsarin semiconductor mai tsabta da kuma photonics inda dole ne a rage gurɓatar abu. -
Faɗin Faɗin Tsarin Aiki na Zafi
Yana kiyaye daidaiton tsarin daga yanayin zafi mai zafi har zuwa sama da 1100°C ba tare da lanƙwasawa ko rugujewa ba. -
Kyakkyawan watsawa ta UV da IR
Yana isar da kyakkyawan haske daga zurfin ultraviolet (DUV) ta hanyar infrared kusa (NIR), yana tallafawa daidaiton aikace-aikacen gani. -
Ƙarancin Faɗaɗawar Zafi Mai Ƙaranci
Yana inganta daidaiton girma a ƙarƙashin canjin yanayin zafi, yana rage damuwa da inganta amincin tsari. -
Mafi Girman Juriya ga Sinadarai
Yana hana shigar yawancin acid, alkalis, da sauran sinadarai cikin jiki—wanda hakan ya sa ya dace da muhallin da ke da tsaurin sinadarai. -
Sassaucin Gamawa na Sama
Akwai shi da kayan gogewa masu santsi, gefe ɗaya ko gefe biyu, masu dacewa da buƙatun photonics da MEMS.
Tsarin Masana'antu na Wafer Gilashin Quartz
Ana samar da wafers ɗin quartz da aka haɗa ta hanyar jerin matakai masu sarrafawa da daidaito:
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Zaɓin Kayan Danye
Zaɓin ma'adini na halitta mai tsarki ko tushen SiO₂ na roba. -
Narkewa da Haɗawa
Ana narkewar quartz a ~2000°C a cikin tanderun lantarki a ƙarƙashin yanayi mai sarrafawa don kawar da abubuwan da ke ciki da kumfa. -
Tsarin Toshewa
Ana sanyaya silica mai narkewa zuwa tubalan ko ingots masu ƙarfi. -
Yankan Wafer
Ana amfani da maƙallan lu'u-lu'u ko na waya don yanke ingots ɗin zuwa cikin wafer blanks. -
Lapping & Gogewa
Duk saman an daidaita su kuma an goge su don dacewa da takamaiman ƙayyadaddun haske, kauri, da kuma ƙazanta. -
Tsaftacewa & Dubawa
Ana tsaftace wafers a cikin ɗakunan tsafta na ISO Class 100/1000 kuma ana duba su sosai don gano lahani da kuma daidaiton girma.
Abubuwan da ke cikin gilashin Quartz
| takamaiman bayani | naúrar | 4" | 6" | 8" | 10" | 12" |
|---|---|---|---|---|---|---|
| Diamita / girma (ko murabba'i) | mm | 100 | 150 | 200 | 250 | 300 |
| Juriya (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Kauri | mm | 0.10 ko fiye | 0.30 ko fiye | 0.40 ko fiye | 0.50 ko fiye | 0.50 ko fiye |
| Babban gidan tunani | mm | 32.5 | 57.5 | Rabin daraja | Rabin daraja | Rabin daraja |
| LTV (5mm×5mm) | μm | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 |
| TTV | μm | < 2 | < 3 | < 3 | < 5 | < 5 |
| Rukayya | μm | ±20 | ±30 | ±40 | ±40 | ±40 |
| Warp | μm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV (5mm×5mm) < 0.4μm | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Zagaye na Gefen | mm | Ya dace da Ma'aunin SEMI M1.2 / duba IEC62276 | ||||
| Nau'in Fuskar | An goge Gefe ɗaya / An goge Gefe biyu | |||||
| Gefen Ra mai gogewa | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Sharuɗɗan Bayan Gida | μm | janar 0.2-0.7 ko kuma an keɓance shi | ||||
Ma'adini vs. Sauran Kayan Aiki Masu Haske
| Kadara | Gilashin Ma'adini | Gilashin Borosilicate | Saffir | Gilashin Daidaitacce |
|---|---|---|---|---|
| Matsakaicin Yanayin Aiki | ~1100°C | ~500°C | ~2000°C | ~200°C |
| Watsawar UV | Madalla (JGS1) | Talaka | Mai kyau | Talauci sosai |
| Juriyar Sinadarai | Madalla sosai | Matsakaici | Madalla sosai | Talaka |
| Tsarkaka | Mai matuƙar girma | Ƙasa zuwa matsakaici | Babban | Ƙasa |
| Faɗaɗawar Zafi | Ƙasa sosai | Matsakaici | Ƙasa | Babban |
| farashi | Matsakaici zuwa babba | Ƙasa | Babban | Ƙasa sosai |
Tambayoyin da ake yawan yi game da Wafer ɗin Gilashin Quartz
T1: Menene bambanci tsakanin quartz mai haɗe da silica mai haɗe?
Duk da cewa duka biyun siffofi ne marasa tsari na SiO₂, fused quartz yawanci yana fitowa ne daga tushen quartz na halitta, yayin da fused silica ana samar da shi ta hanyar roba. A aikace, suna ba da aiki iri ɗaya, amma fused silica na iya samun ɗan tsarki da daidaito.
T2: Za a iya amfani da wafers ɗin quartz da aka haɗa a cikin yanayi mai yawan iska?
Eh. Saboda ƙarancin sinadarin fitar da iskar gas da kuma juriyar zafi mai yawa, wafers ɗin quartz da aka haɗa suna da kyau sosai don tsarin injinan iska da aikace-aikacen sararin samaniya.
T3: Shin waɗannan wafers ɗin sun dace da aikace-aikacen laser mai zurfi-UV?
Hakika. Fused quartz yana da ƙarfin watsawa mai yawa har zuwa ~185 nm, wanda hakan ya sa ya dace da na'urorin hangen nesa na DUV, abin rufe fuska na lithography, da tsarin laser na excimer.
T4: Shin kuna tallafawa ƙirƙirar wafer na musamman?
Eh. Muna bayar da cikakken keɓancewa gami da diamita, kauri, ingancin saman, filaye/launuka, da kuma tsarin laser, bisa ga takamaiman buƙatun aikace-aikacen ku.
game da Mu
XKH ta ƙware a fannin haɓaka fasaha, samarwa, da kuma sayar da gilashin gani na musamman da sabbin kayan lu'ulu'u. Kayayyakinmu suna ba da kayan lantarki na gani, na'urorin lantarki na masu amfani, da kuma sojoji. Muna ba da kayan gani na Sapphire, murfin ruwan tabarau na wayar hannu, yumbu, LT, Silicon Carbide SIC, Quartz, da wafers na lu'ulu'u na semiconductor. Tare da ƙwarewa mai ƙwarewa da kayan aiki na zamani, mun yi fice a fannin sarrafa samfura marasa tsari, da nufin zama babban kamfanin fasahar zamani na kayan lantarki na optoelectronic.
