Nau'in SiC Iri Mai Girki Dia 205/203/208 4H-N don Sadarwar Ganuwa
Sigogi na fasaha
Wafer ɗin irin silicon carbide | |
Nau'in Polytype | 4H |
Kuskuren daidaitawar saman | 4°zuwa <11-20>±0.5º |
Juriya | keɓancewa |
diamita | 205±0.5mm |
Kauri | 600±50μm |
Taurin kai | CMP,Ra≤0.2nm |
Yawan bututun micropipe | ≤1 ea/cm2 |
Ƙira | ≤5, Jimlar Tsawon ≤2*Diamita |
Ƙwayoyin gefe/ƙasa | Babu |
Alamar laser ta gaba | Babu |
Ƙira | ≤2, Jimlar Tsawon ≤Diamita |
Ƙwayoyin gefe/ƙasa | Babu |
Yankunan da aka fi amfani da su | Babu |
Alamar laser ta baya | 1mm (daga gefen sama) |
Gefen | Chamfer |
Marufi | Kaset ɗin wafer mai yawa |
Muhimman Halaye
1. Tsarin Crystal da Aikin Lantarki
· Kwanciyar hankali ta lu'ulu'u: rinjayen nau'in polytype 4H-SiC 100%, babu wani abu da ya haɗa da lu'ulu'u masu yawa (misali, 6H/15R), tare da lanƙwasa mai jujjuyawar XRD mai cikakken faɗi a rabin matsakaicin (FWHM) ≤32.7 arcsec.
· Babban Motsi Mai Jigilar Kaya: Motsi na lantarki na 5,400 cm²/V·s (4H-SiC) da kuma motsi na rami na 380 cm²/V·s, wanda ke ba da damar ƙirar na'urori masu yawan mita.
Taurin Haske: Yana jure wa hasken neutron 1 MeV tare da matsakaicin lalacewar motsi na 1×10¹⁵ n/cm², wanda ya dace da aikace-aikacen sararin samaniya da makaman nukiliya.
2. Halayen Zafi da Inji
· Na'urar auna zafin jiki ta musamman: 4.9 W/cm·K (4H-SiC), sau uku na silicon, wanda ke tallafawa aiki sama da 200°C.
· Ƙarancin Faɗaɗawar Zafi: CTE na 4.0×10⁻⁶/K (25–1000°C), yana tabbatar da dacewa da marufi da aka yi da silicon da kuma rage damuwa ta zafi.
3. Daidaitawar Lalacewa da Sarrafawa
· Yawan bututun micropipe: <0.3 cm⁻² (wafers inci 8), yawan tarkace <1,000 cm⁻² (an tabbatar ta hanyar etching na KOH).
· Ingancin Sama: An goge CMP zuwa Ra <0.2 nm, yana biyan buƙatun daidaitaccen matakin lithography na EUV.
Manhajoji Masu Mahimmanci
| Yanki | Yanayin Aikace-aikace | Fa'idodin Fasaha |
| Sadarwar gani | Na'urorin laser 100G/400G, na'urorin haɗin silicon photonics | Tsarin iri na InP yana ba da damar bandgap kai tsaye (1.34 eV) da heteroepitaxy na tushen Si, yana rage asarar haɗin ido. |
| Sabbin Motocin Makamashi | Masu canza wutar lantarki masu ƙarfin lantarki 800V, masu caji a cikin jirgin (OBC) | Substrates na 4H-SiC suna jure wa fiye da V 1,200, suna rage asarar watsawa da kashi 50% da kuma girman tsarin da kashi 40%. |
| Sadarwa ta 5G | Na'urorin RF masu girman milimita (PA/LNA), amplifiers na tashar tushe | Ƙananan SiC substrates (resistvivity >10⁵ Ω·cm) suna ba da damar haɗakarwa mai yawan mita (60 GHz+). |
| Kayan aikin masana'antu | Na'urori masu auna zafin jiki mai yawa, na'urorin canza wutar lantarki, na'urorin sa ido kan na'urorin nukiliya | Tsarin iri na InSb (bandgap na 0.17 eV) yana ba da ƙarfin maganadisu har zuwa 300% @ 10 T. |
Muhimman Fa'idodi
Tsarin kristal iri na SiC (silicon carbide) yana ba da aiki mara misaltuwa tare da ƙarfin watsa zafi na 4.9 W/cm·K, ƙarfin filin fashewa na 2-4 MV/cm, da kuma faɗin bandgap na 3.2 eV, wanda ke ba da damar amfani da manyan iko, mita mai yawa, da zafin jiki mai yawa. Tare da ƙarancin yawan bututun micro da <1,000 cm⁻², waɗannan substrates suna tabbatar da aminci a cikin mawuyacin yanayi. Rashin ƙarfin sinadarai da saman da suka dace da CVD (Ra <0.2 nm) suna tallafawa ci gaban heteroepitaxial mai ci gaba (misali, SiC-on-Si) don tsarin wutar lantarki na optoelectronics da EV.
Ayyukan XKH:
1. Samarwa na Musamman
· Tsarin Wafer Mai Sauƙi: Wafers mai inci 2-12 tare da yanke-yanke masu zagaye, murabba'i, ko siffofi na musamman (±0.01 mm haƙuri).
· Kula da allurar rigakafi: Daidaitaccen allurar nitrogen (N) da aluminum (Al) ta hanyar CVD, samun juriya yana tsakanin 10⁻³ zuwa 10⁶ Ω·cm.
2. Fasahar Tsarin Ci gaba;
· Heteroepitaxy: SiC-on-Si (ya dace da layukan silicon inci 8) da SiC-on-Diamond (ƙarfin wutar lantarki >2,000 W/m·K).
· Rage Lalacewa: Gyaran hydrogen da kuma rage yawan sinadarin hydrogen don rage lahani ga bututun micropipe/yawan yawa, inganta yawan wafer zuwa >95%.
3. Tsarin Gudanar da Inganci;
· Gwaji Daga Ƙarshe Zuwa Ƙarshe: Raman spectroscopy (tabbatar da nau'in polytype), XRD (crystallinity), da SEM (nazarin lahani).
· Takaddun shaida: Ya dace da AEC-Q101 (mota), JEDEC (JEDEC-033), da MIL-PRF-38534 (matakin soja).
4. Tallafin Sarkar Samar da Kayayyaki na Duniya;
· Ƙarfin Samarwa: Fitar da kayayyaki a kowane wata > wafers 10,000 (60% inci 8), tare da isar da gaggawa na awanni 48.
· Cibiyar Sadarwar Jigilar Kaya: Rufewa a Turai, Arewacin Amurka, da Asiya-Pacific ta hanyar jigilar kaya ta iska/teku tare da marufi mai sarrafa zafin jiki.
5. Haɓaka Haɗin gwiwar Fasaha;
· Dakunan gwaje-gwaje na haɗin gwiwa na R&D: Yi aiki tare kan inganta marufi na module na wutar lantarki na SiC (misali, haɗakar substrate na DBC).
· Lasisin IP: Samar da lasisin fasahar ci gaban GaN-on-SiC RF don rage farashin bincike da ci gaban abokin ciniki.
Takaitaccen Bayani
SiC (silicon carbide) iri na kristal, a matsayin wani abu mai mahimmanci, suna sake fasalin sarƙoƙin masana'antu na duniya ta hanyar ci gaba a cikin girma na lu'ulu'u, sarrafa lahani, da haɗin kai daban-daban. Ta hanyar ci gaba da haɓaka rage lahani na wafer, haɓaka samar da inci 8, da faɗaɗa dandamali na heteroepitaxial (misali, SiC-on-Diamond), XKH yana samar da mafita masu inganci da inganci don optoelectronics, sabon makamashi, da masana'antu na zamani. Alƙawarinmu ga ƙirƙira yana tabbatar da cewa abokan ciniki suna jagoranci a cikin tsaka tsaki na carbon da tsarin fasaha, wanda ke jagorantar zamani na gaba na yanayin semiconductor mai faɗi.









