Wafer mai girman inci 8 na SiC mai girman inci 4H-N SiC substrate
Teburin da ke ƙasa yana nuna ƙayyadaddun bayanai na wafers ɗin SiC ɗinmu mai inci 8:
| SiC nau'in N-type DSP ƙayyadaddun bayanai | |||||
| Lamba | Abu | Naúrar | Samarwa | Bincike | Wawa |
| 1:sigogi | |||||
| 1.1 | nau'in polytype | -- | 4H | 4H | 4H |
| 1.2 | yanayin saman | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Sigar lantarki | |||||
| 2.1 | dopant | -- | Nitrogen na nau'in n | Nitrogen na nau'in n | Nitrogen na nau'in n |
| 2.2 | juriya | ohm · cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Sigar Inji | |||||
| 3.1 | diamita | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | kauri | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Matsayin ƙira | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Zurfin Fitowa | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | μm | ≤5(10mm*10mm) | ≤5(10mm*10mm) | ≤10(10mm*10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Rukayya | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Warp | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Tsarin | |||||
| 4.1 | Yawan bututun micropipe | ea/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | abun ciki na ƙarfe | atom/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
| 5. Ingancin gaba | |||||
| 5.1 | gaba | -- | Si | Si | Si |
| 5.2 | gama saman | -- | CMP mai fuska | CMP mai fuska | CMP mai fuska |
| 5.3 | barbashi | ea/wafer | ≤100 (girma ≥0.3μm) | NA | NA |
| 5.4 | karce | ea/wafer | ≤5, Jimlar Tsawon ≤200mm | NA | NA |
| 5.5 | Gefen guntu/ƙone/fashewa/tabo/gurɓatawa | -- | Babu | Babu | NA |
| 5.6 | Yankunan da aka fi amfani da su | -- | Babu | Yanki ≤10% | Yanki ≤30% |
| 5.7 | alamar gaba | -- | Babu | Babu | Babu |
| 6: Ingancin Baya | |||||
| 6.1 | ƙarshen baya | -- | C-face MP | C-face MP | C-face MP |
| 6.2 | karce | mm | NA | NA | NA |
| 6.3 | Gefen lahani na baya guntu/layi | -- | Babu | Babu | NA |
| 6.4 | Rashin kauri na baya | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Alamar Baya | -- | Notch | Notch | Notch |
| 7:gefe | |||||
| 7.1 | gefen | -- | Chamfer | Chamfer | Chamfer |
| 8: Kunshin | |||||
| 8.1 | marufi | -- | Epi-ready tare da injin tsabtace iska marufi | Epi-ready tare da injin tsabtace iska marufi | Epi-ready tare da injin tsabtace iska marufi |
| 8.2 | marufi | -- | Wafer mai yawa marufi na kaset | Wafer mai yawa marufi na kaset | Wafer mai yawa marufi na kaset |
Cikakken Zane
Kayayyaki Masu Alaƙa
Rubuta saƙonka a nan ka aika mana da shi