4inch SiC Epi wafer don MOS ko SBD

Takaitaccen Bayani:

SiCC tana da cikakken layin samar da wafer na SiC (Silicon Carbide), haɗa haɓakar kristal, sarrafa wafer, ƙirƙira wafer, gogewa, tsaftacewa da gwaji. A halin yanzu, za mu iya samar da axial ko kashe-axis Semi-insulating da Semi-conductive 4H da 6H SiC wafers da masu girma dabam na 5x5mm2, 10x10mm2, 2″, 3″, 4″ da 6″, karya ta hanyar lahani suppression, crystal iri aiki. da sauri girma da sauran Ya karye ta hanyar mabuɗin fasahar kamar su danne lahani, crystal iri aiki da sauri girma, da kuma inganta asali bincike da kuma ci gaban silicon carbide epitaxy, na'urorin da sauran alaka da asali bincike.

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Epitaxy yana nufin haɓakar wani Layer na mafi girman ingancin kayan kristal guda ɗaya akan saman silin carbide substrate. Daga cikin su, haɓakar gallium nitride epitaxial Layer a kan silin-carbide substrate-insulating silica ana kiransa epitaxy iri-iri; girma da siliki carbide epitaxial Layer a saman wani conductive silicon carbide substrate ana kiransa kama epitaxy.

Epitaxial ya dace da buƙatun ƙirar na'urar na haɓaka babban aikin aikin, galibi yana ƙayyade aikin guntu da na'urar, farashin 23%. Babban hanyoyin SiC bakin ciki film epitaxy a wannan mataki sun hada da: sinadaran tururi jijiya (CVD), kwayoyin katako epitaxy (MBE), ruwa lokaci epitaxy (LPE), da pulsed Laser deposition da sublimation (PLD).

Epitaxy hanya ce mai matukar mahimmanci a cikin masana'antar gaba ɗaya. Ta hanyar girma GaN epitaxial yadudduka a kan siliki-carbide substrates, GaN epitaxial wafers dangane da silicon carbide ana samar da su, waɗanda za a iya ƙara yin su cikin na'urorin GaN RF kamar manyan transistor motsi na lantarki (HEMTs);

By girma silicon carbide epitaxial Layer a kan conductive substrate don samun silicon carbide epitaxial wafer, kuma a cikin epitaxial Layer a kan yi na Schottky diodes, zinariya-oxygen rabin filin sakamako transistor, makaran gate bipolar transistor da sauran ikon na'urorin, don haka ingancin na'urorin. epitaxial a kan aikin na'urar yana da matukar tasiri ga ci gaban masana'antu kuma yana taka muhimmiyar rawa.