Wafers SiC mai inci 4 6H Semi-Insulating SiC Substrates masu inganci, bincike, da kuma darajar ƙarya

Wafers SiC mai inci 4 6H Semi-Insulating SiC Substrates prime, bincike, da kuma darajar banza Hoton da aka nuna

Takaitaccen Bayani:

Ana samar da sinadarin silicon carbide mai rabin-insulated ta hanyar yankewa, niƙawa, gogewa, tsaftacewa da sauran fasahar sarrafawa bayan haɓakar lu'ulu'u mai rabin-insulated silicon carbide. Ana shuka wani Layer ko Layer mai yawa na lu'ulu'u a kan substrate wanda ya cika buƙatun inganci azaman epitaxy, sannan ana yin na'urar microwave RF ta hanyar haɗa ƙirar da'ira da marufi. Akwai shi azaman substrates na masana'antu, bincike da gwaji na silicon carbide mai rabin-insulated na aji ɗaya.

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Siffofi

Bayanin Samfuri

Matsayi			Sifili Matsayin Samarwa na MPD (Matsayin Z)			Matsakaicin Matsayi na Samarwa (P Grade)		Daraja ta D (D)
diamita			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Tsarin Wafer			A gefen axis: 4.0° zuwa < 1120 > ±0.5° don 4H-N, A kan axis: <0001>±0.5° don 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Babban Tsarin Faɗi		{10-10} ±5.0°
Babban Tsawon Lebur		32.5 mm±2.0 mm
Tsawon Lebur na Biyu		18.0 mm±2.0 mm
Tsarin Faɗi na Biyu		Fuskar silicon sama: 90° CW. daga Prime flat ±5.0°
Keɓewa a Gefen		3 mm
LTV/TTV/Bow/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Taurin kai			Fuskar C				Yaren mutanen Poland		Ra≤1 nm
			Fuskar Si	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Fashewar Gefen Ta Hanyar Haske Mai Tsanani		Babu						Tsawon jimilla ≤ 10 mm, guda ɗaya tsawon ≤2 mm
Faranti na Hex ta Haske Mai Tsanani		Yankin da aka tara ≤0.05%						Yankin da aka tara ≤0.1%
Yankunan da aka yi amfani da su ta hanyar haske mai ƙarfi		Babu						Yankin da aka tara≤3%
Abubuwan da ke tattare da Carbon na gani		Yankin da aka tara ≤0.05%						Yankin da aka tara ≤3%
Ƙirƙirar saman Silicon ta hanyar Haske Mai Tsanani		Babu						Tsawon jimilla ≤1＊ diamita na wafer
Ƙwayoyin Gefen Suna da Haske Mai Tsanani		Babu wanda aka yarda da shi ≥0.2 mm faɗi da zurfi						An yarda da 5, ≤1 mm kowanne
Gurɓatar Fuskar Silicon Ta Hanyar Ƙarfi Mai Girma		Babu
Marufi		Akwatin Wafer Mai Yawa Ko Akwatin Wafer Guda Ɗaya