Wafer Substrates azaman Maɓallin Maɓalli a cikin Na'urorin Semiconductor
Wafer substrates sune dillalai na zahiri na na'urorin semiconductor, kuma kayan aikin su kai tsaye suna ƙayyade aikin na'urar, farashi, da filayen aikace-aikace. A ƙasa akwai manyan nau'ikan wafer substrates tare da fa'idodi da rashin amfanin su:
-
Raba Kasuwa:Lissafi na sama da 95% na kasuwar semiconductor na duniya.
-
Amfani:
-
Maras tsada:Abubuwan albarkatun kasa da yawa (silicon dioxide), manyan hanyoyin masana'antu, da kuma tattalin arzikin sikeli mai ƙarfi.
-
Babban dacewa da tsari:Fasahar CMOS ta balaga sosai, tana goyan bayan ci gaba nodes (misali, 3nm).
-
Kyakkyawan ingancin crystal:Za'a iya girma manyan wafers diamita (galibi 12-inch, 18-inch ƙarƙashin haɓakawa) tare da ƙarancin ƙarancin lahani.
-
Bargarin inji Properties:Sauƙi don yanke, gogewa, da rikewa.
-
-
Rashin hasara:
-
Ƙunƙarar bandgap (1.12 eV):Babban yoyo halin yanzu a yanayin zafi mai tsayi, yana iyakance ƙarfin na'urar wuta.
-
Bandgap kai tsaye:Ƙarƙashin ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙayyadaddun ƙayyadaddun haske, wanda bai dace da na'urorin optoelectronic kamar LEDs da lasers ba.
-
Motsi mai iyaka:Ƙarƙashin ƙaƙƙarfan aiki mai girma idan aka kwatanta da na'urorin semiconductor.

-
-
Aikace-aikace:Na'urorin RF masu girma (5G/6G), na'urorin optoelectronic (laser, ƙwayoyin rana).
-
Amfani:
-
Babban motsi na lantarki (5-6 × na silicon):Ya dace da babban sauri, aikace-aikacen mitoci masu girma kamar sadarwar millimeter-kalaman.
-
Bandgap kai tsaye (1.42 eV):Canjin hoto mai inganci mai inganci, tushen infrared lasers da LEDs.
-
Babban zafin jiki da juriya na radiation:Ya dace da sararin samaniya da yanayi mai tsauri.
-
-
Rashin hasara:
-
Babban farashi:Karancin abu, girman kristal mai wahala (mai yuwuwa ga tarwatsewa), ƙayyadaddun girman wafer (yafi inch 6).
-
Makanikai masu fashewa:Mai yiwuwa ga karaya, yana haifar da ƙarancin sarrafawa.
-
Guba:Arsenic yana buƙatar kulawa mai ƙarfi da sarrafa muhalli.
-
3. Silicon Carbide (SiC)
-
Aikace-aikace:Babban zafin jiki da na'urorin wutar lantarki mai ƙarfi (EV inverters, tashoshi caji), sararin samaniya.
-
Amfani:
-
Babban bandeji (3.26 eV):Ƙarfin ɓarna mai ƙarfi (10 × na silicon), juriya mai zafi (zazzabi mai aiki> 200 ° C).
-
High thermal conductivity (≈3× silicon):Kyakkyawan zubar da zafi, yana ba da damar ƙarfin ƙarfin tsarin mafi girma.
-
Asarar ƙarancin sauyawa:Yana haɓaka ƙarfin jujjuya wutar lantarki.
-
-
Rashin hasara:
-
Shirye-shiryen substrate mai ƙalubale:Jinkirin girma crystal (> 1 mako), kula da lahani mai wuya (micropipes, dislocations), tsada mai tsada (5-10 × silicon).
-
Karamin girman wafer:Mafi yawan 4-6 inch; 8-inch har yanzu yana kan ci gaba.
-
Wahalar aiwatarwa:Mai wuyar gaske (Mohs 9.5), yin yankan da gogewa yana ɗaukar lokaci.
-
4. Gallium Nitride (GAN)
-
Aikace-aikace:Na'urorin wutar lantarki masu ƙarfi (caji mai sauri, tashoshin tushe na 5G), LEDs/laser masu shuɗi.
-
Amfani:
-
Matsanancin motsi na lantarki + faffadan bandeji (3.4 eV):Haɗa babban mitoci (> 100 GHz) da babban ƙarfin ƙarfin aiki.
-
Ƙananan juriya:Yana rage asarar wutar lantarki.
-
Heteroepitaxy mai jituwa:Wanda aka fi girma akan silicon, sapphire, ko SiC substrates, rage farashi.
-
-
Rashin hasara:
-
Girman girma guda-crystal mai wahala:Heteroepitaxy shine na al'ada, amma rashin daidaituwa na lattice yana gabatar da lahani.
-
Babban farashi:Matsalolin GaN na asali suna da tsada sosai (wafer inch 2 na iya kashe dala dubu da yawa).
-
Kalubalen dogaro:Abubuwan al'amura kamar rugujewar yanzu suna buƙatar haɓakawa.
-
5. Indium Phosphide (InP)
-
Aikace-aikace:Hanyoyin sadarwa masu saurin gani (laser, photodetectors), na'urorin terahertz.
-
Amfani:
-
Motsin ultra-high electron:Yana goyan bayan aikin> 100 GHz, wanda ya fi GaAs.
-
Bandgap kai tsaye tare da daidaita tsawon zango:Babban abu don sadarwa na fiber na gani na 1.3-1.55 μm.
-
-
Rashin hasara:
-
Gaggawa da tsada sosai:Farashin Substrate ya wuce siliki 100 × 100, iyakataccen girman wafer (inch 4-6).
-
6. Sapphire (Al₂O₃)
-
Aikace-aikace:Hasken LED (GaN epitaxial substrate), gilashin murfin mabukaci.
-
Amfani:
-
Maras tsada:Mai rahusa fiye da SiC/GaN substrates.
-
Kyakkyawan kwanciyar hankali na sinadarai:Mai jure lalata, mai tsananin rufewa.
-
Fassara:Ya dace da sifofin LED na tsaye.
-
-
Rashin hasara:
-
Babban rashin daidaituwa da GaN (> 13%):Yana haifar da babban lahani mai yawa, yana buƙatar yadudduka mai ɗaukar hoto.
-
Rashin ƙarancin zafin jiki (~ 1/20 na silicon):Yana iyakance ayyukan LED masu ƙarfi.
-
7. Abubuwan yumbura (AlN, BeO, da sauransu)
-
Aikace-aikace:Masu ba da zafi don manyan kayayyaki masu ƙarfi.
-
Amfani:
-
Insulating + high thermal conductivity (AlN: 170-230 W/m·K):Dace da babban marufi.
-
-
Rashin hasara:
-
Wanda ba guda-crystal:Ba za a iya tallafawa ci gaban na'urar kai tsaye ba, ana amfani da shi azaman marufi kawai.
-
8. Substrates na Musamman
-
SOI (Silicon akan Insulator):
-
Tsarin:Silicon/SiO₂/ Sandwich siliki.
-
Amfani:Yana rage karfin karfin parasitic, mai taurin radiyo, zubar da ruwa (amfani da RF, MEMS).
-
Rashin hasara:30-50% ya fi tsada fiye da silicon.
-
-
Quartz (SiO₂):An yi amfani da shi a cikin hotunan hoto da MEMS; tsayin daka mai zafi amma mai karye sosai.
-
Diamond:Mafi girman ma'aunin zafin jiki (> 2000 W/m·K), ƙarƙashin R&D don matsanancin zafi.
Teburin Taƙaitaccen Kwatancen
| Substrate | Bandgap (eV) | Motsin Electron (cm²/V·s) | Ƙarfafa Ƙarfafawa (W/m·K) | Babban Girman Wafer | Core Applications | Farashin |
|---|---|---|---|---|---|---|
| Si | 1.12 | ~1,500 | ~150 | 12-inci | Logic / Chips Memory | Mafi ƙasƙanci |
| Ga | 1.42 | ~8,500 | ~55 | 4-6 inci | RF / Optoelectronics | Babban |
| SiC | 3.26 | ~900 | ~490 | 6-inch (8-inch R&D) | Na'urorin wuta / EV | Mai Girma |
| GaN | 3.4 | ~2,000 | ~ 130-170 | 4-6 inch (heteroepitaxy) | Saurin caji / RF / LEDs | High (heteroepitaxy: matsakaici) |
| InP | 1.35 | ~ 5,400 | ~70 | 4-6 inci | Sadarwar gani / THz | Maɗaukaki Mai Girma |
| Sapphire | 9.9 (insulator) | - | ~40 | 4-8 inci | LED substrates | Ƙananan |
Mabuɗin Abubuwa don Zaɓin Substrate
-
Bukatun aiki:GaAs/InP don babban mita; SiC don babban ƙarfin lantarki, yanayin zafi; GaAs/InP/GaN don optoelectronics.
-
Ƙuntataccen farashi:Masu amfani da lantarki sun fi son siliki; filaye masu tsayi na iya tabbatar da ƙimar SiC/GaN.
-
Matsalolin haɗin kai:Silicon ya kasance ba a maye gurbinsa don dacewa da CMOS.
-
Gudanar da thermal:Aikace-aikace masu ƙarfi sun fi son SiC ko GaN na tushen lu'u-lu'u.
-
Balagagge sarkar kaya:Si > Sapphire > GaAs > SiC > GaN > InP.
Trend na gaba
Haɗin kai daban-daban (misali, GaN-on-Si, GaN-on-SiC) zai daidaita aiki da farashi, ci gaban tuƙi a cikin 5G, motocin lantarki, da ƙididdigar ƙididdiga.
Lokacin aikawa: Agusta-21-2025






