4 inch SiC Wafers 6H Semi-Insulating SiC Substrates firamare, bincike, da juzu'i.

4 inch SiC Wafers 6H Semi-Insulating SiC Substrates firamare, bincike, da darajoji Featured Hoton

Takaitaccen Bayani:

Semi-insulated silicon carbide substrate an kafa shi ta hanyar yankan, niƙa, gogewa, tsaftacewa da sauran fasahar sarrafa kayan aiki bayan haɓakar kristal silicon carbide kristal da aka keɓe. Layer Layer ko multilayer crystal Layer ana girma a kan abin da ya dace da buƙatun inganci azaman epitaxy, sa'an nan kuma ana yin na'urar RF ta microwave ta hanyar haɗa ƙirar kewaye da marufi. Akwai shi azaman 2inch 3inch 4incgh 6inch 8 inch masana'antu, bincike da gwajin matakin siliki-carbide kristal guda ɗaya.

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Ƙayyadaddun samfur

Daraja			Zero MPD Production Grade (Z Grade)			Daidaitaccen Matsayin Ƙirƙira (P Grade)		Dummy Grade (D Grade)
Diamita			99.5mm ~ 100.0 mm
	4H-SI		500 μm± 20 μm			500 μm± 25 μm
Wafer Orientation			Kashe axis: 4.0° zuwa <1120> ± 0.5° don 4H-N, A kan axis: <0001>±0.5° don 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Hanyar Farko ta Flat		{10-10} ± 5.0°
Tsawon Lantarki na Farko		32.5 mm ± 2.0 mm
Tsawon Lantarki na Sakandare		18.0 mm ± 2.0 mm
Gabatarwar Flat na Sakandare		Fuskar Silicon: 90° CW. daga Prime flat ± 5.0°
Ƙarƙashin Ƙarfi		3 mm ku
LTV/TTV/Baka/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm/≤15 μm/≤25 μm/≤40 μm
Tashin hankali			C fuska				Yaren mutanen Poland		Ra ≤1 nm
			Sa face	CMP	≤0.2 nm					≤0.5 nm
Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙashin Ƙarƙwara		Babu						Tsayin tarawa ≤ 10 mm, guda tsayi ≤2 mm
Hex Plates Ta Babban Haske mai ƙarfi		Tarin yanki ≤0.05%						Tarin yanki ≤0.1%
Wuraren Polytype Ta Hanyar Ƙarfin Ƙarfi		Babu						Tarin yanki≤3%
Haɗin Carbon Na gani		Tarin yanki ≤0.05%						Tarin yanki ≤3%
Silicon Surface Scratches By High Intensity Light		Babu						Tsayin tarawa≤1＊wafer diamita
Edge Chips High By Intensity Light		Babu wanda aka halatta ≥0.2 mm faɗi da zurfin						5 izini, ≤1 mm kowanne
Gurɓatar Silicon Surface Ta Babban Ƙarfi		Babu
Marufi		Cassette mai yawa-wafer ko kwantena wafer guda ɗaya