SiC Ceramic Tray Ƙarshen Tasirin Wafer Gudanar da Abubuwan da aka Yi na Musamman
SiC Ceramic & Alumina Ceramic Custom Abubuwan Taƙaitaccen
Silicon Carbide (SiC) Abubuwan Abubuwan Al'ada na yumbu
Silicon Carbide (SiC) kayan aikin yumbu na al'ada sune manyan kayan aikin yumbu na masana'antu sananne don su.musamman high taurin, m thermal kwanciyar hankali, na kwarai lalata juriya, da high thermal watsin. Silicon Carbide (SiC) kayan aikin yumbu na al'ada suna ba da damar kiyaye kwanciyar hankali a cikinyanayin zafi mai zafi yayin da yake tsayayya da zazzagewar acid mai ƙarfi, alkalis, da narkakken karafa.. SiC ceramics ana kera su ta hanyoyi kamarsintering mara matsi, ɓacin rai, ko zafafan latsawakuma za'a iya keɓance su zuwa sifofi masu sarƙaƙƙiya, gami da zoben hatimi na inji, rigunan hannu, nozzles, bututun tanderu, kwale-kwalen wafer, da faranti masu juriya.
Kayan Aikin Al'ada na Alumina Ceramic
Alumina (Al₂O₃) abubuwan al'ada yumbu suna jaddadahigh rufi, mai kyau inji ƙarfi, da kuma sa juriya. Rarraba ta da maki mai tsabta (misali, 95%, 99%), Alumina (Al₂O₃) abubuwan haɗin yumbu na al'ada tare da mashin ɗin daidaitaccen injin yana ba su damar ƙirƙira su cikin insulators, bearings, kayan aikin yankan, da kayan aikin likita. Alumina yumbura ana yin su da farko ta hanyarbushe latsawa, allura gyare-gyare, ko isostatic latsa matakai, tare da filaye masu gogewa zuwa ƙarewar madubi.
XKH ya ƙware a cikin R&D da samar da al'ada nasilicon carbide (SiC) da alumina (Al₂O₃) yumbura. Kayayyakin yumbura na SiC suna mai da hankali kan yanayin zafi mai zafi, manyan sutura, da gurɓataccen yanayi, suna rufe aikace-aikacen semiconductor (misali, kwale-kwalen wafer, paddles cantilever, bututun murhu) da abubuwan haɗin filin thermal da babban hatimi don sabbin sassan makamashi. Kayayyakin yumbura na alumina suna jaddada rufi, hatimi, da kaddarorin ilimin halitta, gami da na'urorin lantarki, zoben hatimi na inji, da kayan aikin likita. Amfani da fasaha kamarmatsi na isostatic, sintering mara matsi, da ingantattun injina, Mun samar da high-performance musamman mafita ga masana'antu ciki har da semiconductors, photovoltaics, Aerospace, likita, da kuma sinadaran aiki, tabbatar da aka gyara hadu stringent bukatun ga daidaici, tsawon rai, da kuma AMINCI a cikin matsananci yanayi.
SiC Ceramic Functional Chucks & CMP Nika Fayafai Gabatarwa
SiC Ceramic Vacuum Chucks
Silicon Carbide (SiC) Ceramic Vacuum Chucks kayan aikin talla ne masu inganci waɗanda aka ƙera daga kayan yumbu na silicon carbide (SiC). An tsara su musamman don aikace-aikacen da ke buƙatar tsafta da kwanciyar hankali, kamar semiconductor, photovoltaic, da madaidaicin masana'antar masana'anta. Babban fa'idodin su sun haɗa da: fuskar bangon madubi (launi ana sarrafa shi a cikin 0.3-0.5 μm), tsananin ƙarfi mai ƙarfi da ƙarancin haɓakar haɓakawar thermal wanda ya wuce tsawon rayuwar chucks na karfe) . Waɗannan kaddarorin suna ba da damar barga aiki a cikin mahalli tare da canjin yanayi mai girma da ƙarancin zafi, ƙaƙƙarfan lalata, da sarrafa saurin sauri, yana haɓaka yawan amfanin ƙasa da ingantaccen samarwa don ingantattun abubuwa kamar wafers da abubuwan gani.
Silicon Carbide (SiC) Bump Vacuum Chuck don Matsaloli da Bincike
An ƙirƙira shi don ayyukan duba lahani na wafer, wannan ingantaccen kayan aikin tallan kayan aikin an ƙera shi daga kayan yumbu na silicon carbide (SiC). Siffar ƙwanƙwasa ta musamman tana ba da ƙarfin tallan sararin samaniya yayin da rage girman lamba tare da wafer, don haka yana hana lalacewa ko gurɓata saman wafer da tabbatar da kwanciyar hankali da daidaito yayin dubawa. The chuck siffofi na musamman flatness (0.3-0.5 μm) da kuma wani madubi- goge surface, hade tare da matsananci-haske nauyi da kuma high stiffness don tabbatar da kwanciyar hankali a lokacin high-gudun motsi. Matsakaicin ƙarancin haɓakar haɓakar haɓakar thermal yana ba da garantin kwanciyar hankali a ƙarƙashin canjin yanayin zafi, yayin da juriya na lalacewa na tsawaita rayuwar sabis. Samfurin yana goyan bayan keɓancewa a cikin ƙayyadaddun 6, 8, da 12-inch don saduwa da buƙatun dubawa na girman wafer daban-daban.
Juya Chip Bonding Chuck
Ƙwaƙwalwar ɓangarorin ɓangarorin ɓangarorin ɓangarorin ɓangarorin ɓangarorin ɓangarorin ɓangarorin ɓangarorin ɗimbin ɗimbin yawa, musamman waɗanda aka ƙera don daidaitattun wafers don tabbatar da kwanciyar hankali yayin ayyukan haɗin gwiwa mai sauri, daidaici. Yana siffofi da wani madubi- goge saman (lalata/daidaitacce ≤1 μm) da kuma daidaitaccen tashar tashar iskar gas don cimma ƙarfin adsorption iri ɗaya, hana ƙaurawar wafer ko lalacewa. Matsayinsa mai girma da ƙarancin ƙarancin haɓakar haɓakar thermal (kusa da kayan silicon) yana tabbatar da kwanciyar hankali a cikin yanayin haɗin kai mai zafi, yayin da kayan haɓaka mai girma (misali, silicon carbide ko kayan yumbu na musamman) yana hana haɓakar iskar gas, yana kiyaye amincin dogon lokaci. Waɗannan halaye tare suna goyan bayan daidaiton matakin haɗin micron kuma suna haɓaka yawan marufi na guntu.
SiC Bonding Chuck
Silicon carbide (SiC) haɗin haɗin gwiwa shine ainihin ƙayyadaddun ƙayyadaddun tsarin haɗin gwiwar guntu, musamman an tsara shi don daidaitaccen adsorbing da amintaccen wafers, yana tabbatar da ingantaccen aiki mai ƙarfi a ƙarƙashin yanayin zafi mai ƙarfi da yanayin haɗin kai. Kerarre daga high-yawa silicon carbide yumbu (porosity <0.1%), yana cimma daidaitattun rarraba ƙarfi ta hanyar rarrabawa (raɓawa <5%) ta hanyar nanometer-level madubi polishing (surface roughness Ra <0.1 μm) da madaidaicin tashar tashar iskar gas (pore diamita: 5-50) ko lalata ƙasa. Its matsananci-ƙananan haɓakawar haɓakawar thermal (4.5 × 10⁻⁶ / ℃) ya yi daidai da na wafers na silicon, yana rage tasirin tasirin zafi. Haɗe tare da babban taurin (modules na roba> 400 GPa) da ≤1 μm flatness / parallelism, yana ba da garantin daidaita daidaiton haɗin gwiwa. An yi amfani da shi sosai a cikin marufi na semiconductor, 3D stacking, da haɗin gwiwar Chiplet, yana goyan bayan aikace-aikacen masana'anta na ƙarshe waɗanda ke buƙatar daidaiton nanoscale da kwanciyar hankali na thermal.
CMP niƙa Disc
Fayil ɗin niƙa na CMP shine babban ɓangaren kayan aikin sinadarai na polishing (CMP), musamman an ƙera shi don kiyayewa da daidaita wafers yayin gogewa mai saurin gaske, yana ba da damar tsarin matakin nanometer na duniya. An gina shi daga ƙaƙƙarfan ƙarfi, kayan ɗimbin yawa (misali, yumbu na silicon carbide ko kayan gami na musamman), yana tabbatar da tallan injin yumɓu ta hanyar madaidaicin tashar tashar iskar gas. Fuskar madubi mai gogewa (launi/daidaitacce ≤3 μm) yana ba da garantin hulɗar da ba ta da damuwa tare da wafers, yayin da ƙarancin ƙarancin haɓakar haɓakar thermal (wanda ya dace da silicon) da tashoshi masu sanyaya na ciki suna hana nakasar thermal yadda ya kamata. Dace da 12-inch (750 mm diamita) wafers, da faifai leverages watsa bonding fasahar don tabbatar da m hadewa da kuma dogon lokacin da dogara na multilayer Tsarin karkashin high yanayin zafi da kuma matsa lamba, muhimmanci inganta CMP tsari daidaito da kuma yawan amfanin ƙasa.
Gabatarwa daban-daban na SiC Ceramics Gabatarwa
Silicon Carbide (SiC) madubi Square
Silicon Carbide (SiC) madubi madubi babban madaidaicin kayan gani ne wanda aka kera daga yumbu silikon carbide na ci gaba, musamman an tsara shi don manyan kayan aikin masana'antar semiconductor kamar injunan lithography. Yana cimma matsananci-haske nauyi da kuma high stiffness (na roba modulus> 400 GPa) ta hanyar m nauyi tsarin zane (misali, backside saƙar zuma hollowing), yayin da matsananci low thermal fadada coefficient (≈4.5 × 10⁻⁻ / ℃ ≈ 10 ⁻ / ℃ kwanciyar hankali a karkashin yanayin zafi). Fuskar madubi, bayan gyaran gyare-gyaren daidai, yana kaiwa ≤1 μm flatness / daidaitawa, da juriya na musamman (Mohs hardness 9.5) yana haɓaka rayuwar sabis. Ana amfani dashi ko'ina a cikin wuraren aikin injin lithography, na'urorin hasken laser, da na'urorin hangen nesa inda madaidaicin madaidaici da kwanciyar hankali ke da mahimmanci.
Silicon Carbide (SiC) Jagororin Yawo na iska
Silicon Carbide (SiC) Jagororin Yawo na iska suna amfani da fasaha mai ɗaukar iska mara lamba, inda iskar gas ɗin ke samar da fim ɗin matakin micron (yawanci 3-20μm) don cimma motsi mara ƙarfi da motsi mara ƙarfi. Suna ba da daidaiton motsi na nanometric (maimaita daidaitattun matsayi har zuwa ± 75nm) da daidaitaccen juzu'i na ƙananan micron (daidaita ± 0.1-0.5μm, flatness ≤1μm), wanda aka kunna ta hanyar rufaffiyar amsawar amsawa tare da ma'aunin ma'auni mai ma'ana ko interferometers na laser. Babban siliki carbide yumbu kayan (zaɓuɓɓukan sun haɗa da jerin Coresic® SP / Marvel Sic) yana ba da ƙarfi mai ƙarfi (modules na roba> 400 GPa), ƙarancin haɓakar haɓakar thermal mai ƙarancin ƙarfi (4.0-4.5 × 10⁻⁶ / K, silicon matching), da (1%). Tsarinsa mai nauyi (yawan 3.1g / cm³, na biyu kawai ga aluminum) yana rage motsin motsi, yayin da juriya na ban mamaki (Mohs hardness 9.5) da kwanciyar hankali na thermal suna tabbatar da dogaro na dogon lokaci a ƙarƙashin babban saurin (1m / s) da yanayin haɓaka (4G). Ana amfani da waɗannan jagororin a ko'ina a cikin lithography na semiconductor, binciken wafer, da injuna madaidaici.
Silicon Carbide (SiC) Cross-Beams
Silicon Carbide (SiC) Cross-Beams sune ainihin abubuwan motsa jiki waɗanda aka tsara don kayan aikin semiconductor da aikace-aikacen masana'antu masu tsayi, da farko suna aiki don ɗaukar matakan wafer da jagorance su tare da ƙayyadaddun hanyoyin don babban saurin, matsananci-daidaicin motsi. Yin amfani da yumbu na siliki carbide mai girma (zaɓuɓɓukan sun haɗa da Coresic® SP ko jerin Marvel Sic) da ƙirar tsarin nauyi, suna cimma nauyin haske mai ƙarfi tare da tauri mai ƙarfi (modules na roba> 400 GPa), tare da ƙarancin ƙarancin ƙarancin zafi na haɓakar thermal da (≈ 4.5 ×) yawa (porosity <0.1%), tabbatar da kwanciyar hankali nanometric (lalata / daidaitawa ≤1μm) a ƙarƙashin matsalolin thermal da inji. Abubuwan da aka haɗa su suna tallafawa ayyuka masu sauri da haɓaka (misali, 1m / s, 4G), yana sanya su manufa don injunan lithography, tsarin bincikar wafer, da ƙirar ƙira, haɓaka daidaiton motsi da ingantaccen amsawa.
Abubuwan Motsi na Silicon Carbide (SiC).
Abubuwan Motsi na Silicon Carbide (SiC) sassa ne masu mahimmanci waɗanda aka tsara don tsarin motsi na semiconductor, suna amfani da kayan SiC masu girma (misali Coresic® SP ko jerin Marvel Sic, porosity <0.1%) da ƙirar tsari mai sauƙi Tare da ƙarancin ƙarancin haɓakar haɓakawar thermal (≈4.5 × 10⁻⁶ / ℃), suna tabbatar da kwanciyar hankali na nanometric (lalata / daidaitawa ≤1μm) ƙarƙashin haɓakar thermal. Wadannan kaddarorin da aka haɗa suna tallafawa ayyuka masu sauri da haɓaka (misali, 1m / s, 4G), yana sanya su manufa don injunan lithography, tsarin dubawa na wafer, da ƙirar ƙira, haɓaka daidaiton motsi da ingantaccen amsawa.
Silicon Carbide (SiC) Plate na gani na gani
Silicon Carbide (SiC) Plate na gani na gani shine tushen tushen dandamali wanda aka tsara don tsarin hanyoyin-hanyoyi biyu a cikin kayan binciken wafer. An ƙera shi daga yumbu mai ƙarfi na silicon carbide yumbu, yana samun nauyi mai sauƙi (yawanci ≈3.1 g / cm³) da taurin ƙarfi (modules na roba> 400 GPa) ta hanyar ƙirar tsarin nauyi, yayin da ke nuna ƙarancin ƙarancin haɓakar haɓakar thermal. (≈4.5 × 10⁻⁶ / ℃) da kuma babban yawa (porosity <0.1%), tabbatar da kwanciyar hankali nanometric (flatness / parallelism ≤0.02mm) a karkashin thermal da inji hawa da sauka. Tare da babban matsakaicin girmansa (900 × 900mm) da ingantaccen aiki mai mahimmanci, yana ba da ingantaccen tsayin tsayin tsayin daka don tsarin gani, yana haɓaka daidaiton dubawa da aminci. Ana amfani dashi ko'ina a cikin ilimin yanayin semiconductor, daidaitawar gani, da ingantaccen tsarin hoto.
Graphite + Tantalum Carbide Rufaffen Jagorar Zobe
The Graphite + Tantalum Carbide Rufaffen Jagora Ring wani muhimmin abu ne da aka kera musamman don kayan haɓakar kristal guda ɗaya na silicon carbide (SiC). Babban aikinsa shi ne kai tsaye kai tsaye ga kwararar iskar gas mai zafi, yana tabbatar da daidaito da kwanciyar hankali na yanayin zafi da kwararar filayen a cikin ɗakin amsawa. Kerarre daga babban-tsarki graphite substrate 2200C), yadda ya kamata hana silicon tururi lalata da kuma murkushe kazanta yaduwa. Babban daidaituwa na rufin (raguwar <3%, cikakken ɗaukar hoto) yana tabbatar da daidaitaccen jagorar gas da amincin sabis na dogon lokaci, yana haɓaka inganci da yawan amfanin ƙasa na SiC guda kristal girma.
Silicon Carbide (SiC) Furnace Tube Abstract
Silicon Carbide (SiC) Bututun Furnace A tsaye
Silicon Carbide (SiC) Bututun Furnace na tsaye wani muhimmin abu ne wanda aka tsara don kayan aikin masana'antu masu zafin jiki, da farko yana aiki azaman bututun kariya na waje don tabbatar da rarrabawar thermal iri ɗaya a cikin tanderun ƙarƙashin yanayin iska, tare da yanayin yanayin aiki na yau da kullun na kusan 1200 ° C. Kerarre ta hanyar 3D bugu hadedde forming fasahar, shi siffofi da tushe kayan ƙazanta abun ciki <300 ppm, kuma za a iya zaɓin sanye take da CVD silicon carbide shafi (rufi najasa <5 ppm)). Haɗa high thermal watsin (≈20 W / m · K) da kuma m thermal girgiza kwanciyar hankali (juriya da thermal gradients> 800 ° C), shi ne yadu amfani a high-zazzabi matakai kamar semiconductor zafi magani, photovoltaic abu sintering, da kuma daidai yumbu samar, da muhimmanci lokaci-lokaci AMINCI na kayan aiki.
Silicon Carbide (SiC) Tube Horizontal Furnace Tube
The Silicon Carbide (SiC) Horizontal Furnace Tube wani core bangaren tsara don high-zazzabi matakai, bauta a matsayin tsari tube aiki a cikin yanayi dauke da oxygen (reactive gas), nitrogen (kariya gas), da kuma gano hydrogen chloride, tare da yanayin aiki na al'ada a kusa da 1250 ° C. Kerarre ta hanyar 3D bugu hadedde forming fasahar, shi siffofi da tushe kayan ƙazanta abun ciki <300 ppm, kuma za a iya zaɓin sanye take da CVD silicon carbide shafi (rufi najasa <5 ppm)). Haɗuwa high thermal conductivity (≈20 W / m · K) da kuma m thermal girgiza kwanciyar hankali (juriya da thermal gradients> 800 ° C), shi ne manufa domin bukatar semiconductor aikace-aikace kamar hadawan abu da iskar shaka, watsawa, da bakin ciki-film jigo, tabbatar da tsarin mutunci da kwanciyar hankali a karkashin dogon lokaci tsarki yanayi.
Gabatarwar SiC Ceramic Fork Arms
Semiconductor Manufacturing
A cikin masana'antar wafer semiconductor, SiC yumbu cokali mai yatsu ana amfani da farko don canja wuri da sanya wafers, galibi ana samun su a:
- Kayan Aiki na Wafer: Irin su kaset ɗin wafer da kuma sarrafa jiragen ruwa, waɗanda ke aiki da ƙarfi a cikin yanayin zafi mai zafi da ɓarna.
- Injin Lithography: Ana amfani da su a cikin ingantattun abubuwa kamar matakai, jagorori, da makaman robobi, inda tsayin su da ƙarancin nakasar zafi suna tabbatar da daidaiton matakin nanometer.
- Tsarin Etching da Watsawa: Yin hidima azaman ICP etching trays da abubuwan da aka gyara don hanyoyin watsawa na semiconductor, tsaftarsu mai tsayi da juriya na lalata suna hana gurɓatawa a cikin ɗakunan sarrafawa.
Masana'antu Automation da Robotics
SiC yumbura cokali mai yatsu kayan aiki ne masu mahimmanci a cikin manyan robobin masana'antu da kayan aiki mai sarrafa kansa:
- Ƙarshen Ƙarshen Ƙarshen Robotic: Ana amfani da shi don sarrafawa, taro, da daidaitattun ayyuka. Kaddarorinsu masu nauyi (yawan ~ 3.21 g / cm³) suna haɓaka saurin robot da inganci, yayin da babban taurin su (Taurin Vickers ~ 2500) yana tabbatar da juriya na musamman.
- Layukan Samar da Kai ta atomatik: A cikin yanayin yanayin da ke buƙatar mitoci mai girma, madaidaicin kulawa (misali, shagunan e-kasuwanci, ajiyar masana'anta), Makamai cokali mai yatsa na garantin aiki na dogon lokaci.
Aerospace da New Energy
A cikin matsanancin yanayi, SiC yumbu cokali mai yatsu makamai suna ba da damar juriya mai zafi, juriyar lalata, da juriya mai zafi:
- Aerospace: An yi amfani da shi a cikin mahimman sassa na jiragen sama da jiragen sama marasa matuki, inda ƙananan nauyinsu da ƙarfin ƙarfinsu ke taimakawa rage nauyi da haɓaka aiki.
- Sabon Makamashi: Ana amfani da kayan aikin samarwa don masana'antar photovoltaic (misali, tanderun watsawa) kuma azaman ingantattun abubuwan da aka gyara a cikin masana'antar batirin lithium-ion.
Sarrafa Masana'antu Mai Girman Zazzabi
SiC yumbu cokali mai yatsu makamai na iya jure yanayin zafi sama da 1600C, yana sa su dace da:
- Metallurgy, Ceramics, da Gilashin Masana'antu: Ana amfani da su a cikin masu sarrafa zafin jiki, faranti, da faranti.
- Makamashin Nukiliya: Saboda juriyarsu ta radiation, sun dace da wasu abubuwan da ke cikin injinan nukiliya.
Kayan Aikin Lafiya
A fannin likitanci, SiC yumbura cokali mai yatsu ana amfani da shi da farko don:
- Robots na Likita da Kayan aikin tiyata: Suna da ƙima don dacewarsu ta rayuwa, juriyar lalata, da kwanciyar hankali a cikin mahalli na haifuwa.
SiC Coating Overview
| Kaddarorin na yau da kullun | Raka'a | Darajoji |
| Tsarin |
| FCC β lokaci |
| Gabatarwa | Juzu'i (%) | 111 fi so |
| Yawan yawa | g/cm³ | 3.21 |
| Tauri | Vickers taurin | 2500 |
| Ƙarfin zafi | J·k-1 · K-1 | 640 |
| Faɗawar thermal 100-600 °C (212-1112 °F) | 10-6K-1 | 4.5 |
| Modul na Young | Gpa (4pt lankwasa, 1300 ℃) | 430 |
| Girman hatsi | μm | 2 ~ 10 |
| Zazzabi Sublimation | ℃ | 2700 |
| Ƙarfin Felexural | MPa (RT 4-maki) | 415 |
| Ƙarfafawar thermal | (W/mK) | 300 |
Silicon Carbide Ceramic Tsarin Tsarin Sassa
Silicon carbide yumbu tsarin abubuwa ana samun su daga siliki carbide barbashi hade tare ta sintering. Ana amfani da su sosai a cikin motoci, injina, sunadarai, semiconductor, fasahar sararin samaniya, microelectronics, da sassan makamashi, suna taka muhimmiyar rawa a aikace-aikace daban-daban a cikin waɗannan masana'antu. Saboda kyawawan kaddarorin su, abubuwan haɗin ginin yumbu na silicon carbide sun zama ingantaccen abu don matsanancin yanayi wanda ya haɗa da zafin jiki, matsa lamba, lalata, da lalacewa, yana ba da ingantaccen aiki da tsawon rai a cikin ƙalubalen yanayin aiki.Bayanan SiC Seal Parts
SiC hatimi babban zaɓi ne don matsananciyar yanayi (kamar babban zafin jiki, babban matsin lamba, watsa labarai masu lalata, da sawa mai saurin gaske) saboda taurin su na musamman, juriya, juriya mai zafi mai zafi (tare da yanayin zafi har zuwa 1600 ° C ko ma 2000 ° C), da juriya na lalata. Babban ƙarfin zafin su yana sauƙaƙe ingantacciyar ɓarkewar zafi, yayin da ƙarancin ƙarancin juzu'i da kaddarorin sa mai suna ƙara tabbatar da amincin hatimi da tsawon rayuwar sabis a ƙarƙashin matsanancin yanayin aiki. Waɗannan halayen suna yin hatimin SiC da aka yi amfani da su sosai a masana'antu kamar su petrochemicals, hakar ma'adinai, masana'antar semiconductor, jiyya na ruwa, da makamashi, rage ƙimar kulawa sosai, rage ƙarancin lokaci, da haɓaka ingantaccen aiki da aminci na kayan aiki.
Takaitacce SiC Ceramic Plates
Silicon Carbide (SiC) faranti na yumbura sun shahara saboda taurinsu na musamman (Taurin Mohs har zuwa 9.5, na biyu kawai zuwa lu'u-lu'u), fitaccen yanayin zafin jiki (fiye da mafi yawan yumbu don ingantaccen sarrafa zafi), da ƙarancin inertness na sinadarai da zafin jiki mai ƙarfi (tsayin juriya mai ƙarfi, alkalis da sauri). Waɗannan kaddarorin suna tabbatar da kwanciyar hankali na tsari da ingantaccen aiki a cikin matsanancin yanayi (misali, zafin jiki mai ƙarfi, abrasion, da lalata), yayin haɓaka rayuwar sabis da rage bukatun kulawa.
SiC yumbura faranti ana amfani da ko'ina a cikin manyan ayyuka:
• Abrasives da Nika Tools: Leveraging matsananci-high tauri ga masana'anta ƙafafun nika da polishing kayayyakin aiki, inganta daidaici da karko a abrasive muhallin.
Kayayyakin Refractory: Yin hidima a matsayin rufin murhu da kayan aikin kiln, kiyaye kwanciyar hankali sama da 1600°C don haɓaka haɓakar thermal da rage farashin kulawa.
• Masana'antar Semiconductor : Yin aiki azaman kayan aiki na na'urorin lantarki masu ƙarfi (misali, diodes mai ƙarfi da RF amplifiers), suna tallafawa ayyuka masu ƙarfi da zafi mai ƙarfi don haɓaka dogaro da ingantaccen makamashi.
Simintin gyare-gyare da narkewa: Sauya kayan gargajiya a cikin sarrafa ƙarfe don tabbatar da ingantaccen canjin zafi da juriyar lalata sinadarai, haɓaka ingancin ƙarfe da ƙimar farashi.
SiC Wafer Boat Abstract
XKH SiC kwale-kwalen yumbura suna ba da kwanciyar hankali mafi girma, rashin kuzarin sinadarai, ingantacciyar injiniya, da ingantaccen tattalin arziki, yana ba da mafita mai inganci don masana'antar semiconductor. Suna haɓaka amincin wafer mai mahimmanci, tsabta, da ingantaccen samarwa, yana mai da su abubuwan da ba dole ba ne a cikin ƙirar wafer na ci gaba.
SiC ceramic boats Aikace-aikace:
Ana amfani da kwale-kwalen yumbura na SiC a ko'ina a cikin matakan gaba-gaba, gami da:
•Tsarin Zubewa: Irin su LPCVD (Tsarin Turin Sinadarai Mai Rage Matsawa) da PECVD (Tsarin Turin Sinadarai Mai Inganta Plasma).
•Maganin zafin jiki: Ciki har da thermal oxidation, annealing, diffusion, and ion implantation.
•Wet & Tsaftacewa Tsari: Tsabtace Wafer da matakan sarrafa sinadarai.
Mai jituwa tare da yanayin yanayin yanayi da yanayin tsarin injin,
sun dace don fabs waɗanda ke neman rage haɗarin kamuwa da cuta da haɓaka haɓakar samarwa.
Ma'auni na SiC Wafer Boat:
| Abubuwan Fasaha | ||||
| Fihirisa | Naúrar | Daraja | ||
| Sunan Abu | Reaction Sintered Silicon Carbide | Sintered Silicon Carbide mara matsi | Silicon Carbide da aka sake buɗewa | |
| Abun ciki | RBSiC | SSiC | R-SiC | |
| Yawan yawa | g/cm3 | 3 | 3.15 ± 0.03 | 2.60-2.70 |
| Ƙarfin Flexural | MPa (kpsi) | 338 (49) | 380(55) | 80-90 (20°C) 90-100(1400°C) |
| Ƙarfin Ƙarfi | MPa (kpsi) | 1120 (158) | 3970(560) | > 600 |
| Tauri | Knoop | 2700 | 2800 | / |
| Breaking Tenacity | MPa m1/2 | 4.5 | 4 | / |
| Thermal Conductivity | W/mk | 95 | 120 | 23 |
| Coefficient na Thermal Expansion | 10-6.1/C | 5 | 4 | 4.7 |
| Takamaiman Zafi | Joule/g 0k | 0.8 | 0.67 | / |
| Matsakaicin zafin jiki a cikin iska | ℃ | 1200 | 1500 | 1600 |
| Na roba Modulus | Gpa | 360 | 410 | 240 |
SiC Ceramics Daban-daban Abubuwan Abubuwan Abubuwan Al'ada
SiC Ceramic Membrane
SiC ceramic membrane shine ingantaccen bayani na tacewa wanda aka ƙera daga siliki carbide mai tsafta, yana nuna ƙaƙƙarfan tsari mai Layer uku (launi mai goyan baya, madaurin canji, da membrane na rabuwa) wanda aka ƙera ta hanyar tafiyar matakai masu zafi mai zafi. Wannan ƙira yana tabbatar da ƙarfin injin na musamman, daidaitaccen girman girman pore, da tsayin daka. Ya yi fice a aikace-aikacen masana'antu daban-daban ta hanyar rarrabawa, tattara hankali, da tsarkake ruwa mai inganci. Mahimman abubuwan da ake amfani da su sun haɗa da kula da ruwa da ruwan sha (cire daskararrun daskararru, ƙwayoyin cuta, da gurɓatattun ƙwayoyin cuta), sarrafa abinci da abin sha (bayyana da tattara ruwan 'ya'yan itace, kiwo, da ruwa mai fermented), ayyukan harhada magunguna da fasahar kere-kere (tsarkake biofluids da tsaka-tsaki), sarrafa sinadarai (tace ruwa mai lalata da masu kara kuzari), da aikace-aikacen cire mai da iskar gas).
SiC Pipes
SiC (silicon carbide) bututun kayan aikin yumbu ne masu girman gaske waɗanda aka tsara don tsarin wutar lantarki na semiconductor, waɗanda aka kera daga siliki carbide mai tsafta mai tsafta ta hanyar dabarun sintering na ci gaba. Suna nuna ƙayyadaddun ƙayyadaddun yanayin zafi, kwanciyar hankali mai zafi (tare da 1600 ° C), da juriya na lalata sinadarai. Ƙarfin haɓakawar haɓakar haɓakar zafin zafi da ƙarfin injina yana tabbatar da kwanciyar hankali a ƙarƙashin matsananciyar hawan zafi, yadda ya kamata yana rage nakasar zafin zafi da lalacewa. Bututun SiC sun dace da tanderun watsawa, murhun iskar oxygen, da tsarin LPCVD/PECVD, yana ba da damar rarraba yanayin zafin jiki iri ɗaya da yanayin tsari don rage lahani na wafer da haɓaka daidaituwar yanayin fim na bakin ciki. Bugu da ƙari, ƙaƙƙarfan tsari mara ƙarfi da rashin kuzarin sinadarai na SiC suna tsayayya da yashwar iskar gas mai ƙarfi kamar oxygen, hydrogen, da ammonia, tsawaita rayuwar sabis da tabbatar da tsaftar tsari. Ana iya daidaita bututun SiC cikin girman da kauri na bango, tare da ingantacciyar mashin ɗin cimma santsin saman ciki da babban maida hankali don tallafawa kwararar laminar da daidaitattun bayanan martaba na thermal. Surface polishing ko shafi zažužžukan kara rage barbashi tsara da kuma inganta lalata juriya, saduwa da stringent bukatun na semiconductor masana'antu ga daidaito da kuma AMINCI.
SiC Ceramic Cantilever Paddle
Zane-zanen monolithic na SiC cantilever ruwan wukake yana haɓaka ƙarfin injina da daidaituwar yanayin zafi yayin da yake kawar da haɗin gwiwa da raunin maki gama gari a cikin kayan haɗin gwiwa. Filayen su yana da madaidaicin- gogewa zuwa kusa da madubi, yana rage ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ɗaki. Inertia sinadarai na SiC yana hana fitar da gas, lalata, da gurɓataccen tsari a cikin mahalli masu amsawa (misali, oxygen, tururi), yana tabbatar da kwanciyar hankali da aminci a cikin hanyoyin watsawa / iskar shaka. Duk da hawan keke mai zafi mai sauri, SiC tana kiyaye mutuncin tsari, tsawaita rayuwar sabis da rage raguwar kulawa. Yanayin SiC mara nauyi yana ba da damar amsawar zafi mai sauri, haɓaka ƙimar dumama / sanyaya da haɓaka yawan aiki da ƙarfin kuzari. Ana samun waɗannan ruwan wukake a cikin masu girma dabam (dace da 100mm zuwa 300mm+ wafers) kuma suna dacewa da ƙirar tanderu daban-daban, suna ba da daidaiton aiki a duka matakan gaba-gaba da na baya-baya.
Alumina Vacuum Chuck Gabatarwa
Al₂O₃ vacuum chucks kayan aiki ne masu mahimmanci a cikin masana'anta na semiconductor, suna ba da tsayayye da ingantaccen tallafi a cikin matakai da yawa:•Thinning: Yana ba da goyan baya iri ɗaya yayin daɗaɗɗen wafer, yana tabbatar da raguwar madaidaicin madaidaicin don haɓaka ɓarnawar guntu da aikin na'urar.
Dicing: Yana ba da amintaccen adsorption yayin dicing ɗin wafer, rage haɗarin lalacewa da tabbatar da yanke tsaftataccen guntu guda ɗaya.
•Cleaning: Its santsi, uniform adsorption surface sa tasiri gurbatawa kau ba tare da žata wafers a lokacin tsaftacewa tafiyar matakai.
• Yin jigilar kaya: Yana ba da ingantaccen tallafi amintacce yayin sarrafa wafer da sufuri, rage haɗarin lalacewa da gurɓatawa.
1.Uniform Micro-Porous Ceramic Technology
• Yana amfani da nano-foda don ƙirƙirar ko'ina rarraba da kuma haɗa pores, haifar da babban porosity da kuma daidai m tsari ga m da kuma abin dogara wafer goyon baya.
2.Exceptional Material Properties
-An yi shi daga alumina mai tsafta 99.99% (Al₂O₃), yana nuna:
• Thermal Properties : Babban juriya na zafi da kyakkyawan yanayin zafi, dace da yanayin yanayin zafi mai zafi.
• Kayan aikin injiniya: Ƙarfi da taurin suna tabbatar da dorewa, juriya, da tsawon rayuwar sabis.
• Ƙarin Abũbuwan amfãni: Babban rufin lantarki da juriya na lalata, masu dacewa da yanayin masana'antu daban-daban.
3.Mafi girman kai da daidaito• Yana tabbatar da daidaitaccen ma'auni na wafer tare da babban lebur da daidaito, rage haɗarin lalacewa da kuma tabbatar da daidaiton sakamakon sarrafawa. Kyakkyawar iskar sa da ƙarfi iri ɗaya na ƙara haɓaka amincin aiki.
Al₂O₃ vacuum chuck yana haɗu da ingantacciyar fasahar micro-porous, keɓaɓɓen kaddarorin kayan, da kuma babban madaidaici don tallafawa matakai masu mahimmanci na semiconductor, tabbatar da inganci, aminci, da sarrafa gurɓatawa a duk matakan bakin ciki, dicing, tsaftacewa, da jigilar kayayyaki.
Alumina Robot Arm & Alumina Ceramic End Brief Brief
Alumina (Al₂O₃) yumbu robotic makamai sune mahimman abubuwan da ake buƙata don sarrafa wafer a masana'antar semiconductor. Suna tuntuɓar wafers kai tsaye kuma suna da alhakin madaidaicin canja wuri da matsayi a cikin wurare masu buƙatu kamar vacuum ko yanayin zafi mai girma. Babban darajar su ta ta'allaka ne a cikin tabbatar da amincin wafer, hana gurɓatawa, da haɓaka ingantaccen aikin kayan aiki da yawan amfanin ƙasa ta hanyar keɓaɓɓen kaddarorin kayan.
| Feature Dimension | Cikakken Bayani |
| Mechanical Properties | Tsabtataccen alumina (misali,> 99%) yana ba da ƙarfi mai ƙarfi (taurin Mohs har zuwa 9) da ƙarfin sassauƙa (har zuwa 250-500 MPa)
|
| Insulation na Lantarki | Juriya zafin ɗaki har zuwa 10¹⁵ Ω·cm da ƙarfin rufewa na 15 kV/mm suna hana fitarwar lantarki da kyau (ESD), yana kare wafers masu hankali daga tsangwama da lalacewa ta lantarki.
|
| Thermal Stability | Matsayin narkewa kamar 2050 ° C yana ba da damar jure yanayin zafi mai zafi (misali, RTA, CVD) a masana'antar semiconductor. Ƙarƙashin haɓakar haɓakar yanayin zafi yana rage girman warping kuma yana kiyaye kwanciyar hankali a ƙarƙashin zafi.
|
| Chemical Inertness | Rashin ƙarfi ga yawancin acid, alkalis, gas ɗin sarrafawa, da abubuwan tsaftacewa, hana gurɓataccen ƙwayar cuta ko sakin ƙarfe ion. Wannan yana tabbatar da yanayin samarwa mai tsafta kuma yana gujewa gurɓacewar ƙasa.
|
| Sauran Amfanin | Fasahar sarrafa balagagge tana ba da ingantaccen farashi mai tsada; filaye na iya zama daidai- goge-goge zuwa ƙarancin ƙazanta, yana ƙara rage haɗarin tsara tsararraki.
|
Alumina yumbu robotic makamai ana amfani da su da farko a cikin matakan masana'antu na gaba-gaba, gami da:
• Sarrafa Wafer da Matsayi: Amintacce da daidai canja wuri da wafers (misali, 100mm zuwa 300mm+ masu girma dabam) a cikin vacuum ko tsaftataccen mahalli na iskar gas, rage lalacewa da haɗari.
• Hanyoyin Zazzabi: Irin su saurin haɓakar thermal (RTA), haɓakar tururi na sinadarai (CVD), da etching plasma, inda suke kiyaye kwanciyar hankali a ƙarƙashin yanayin zafi mai ƙarfi, tabbatar da daidaiton tsari da yawan amfanin ƙasa.
• Tsarukan Gudanar da Wafer Na atomatik: Haɗa cikin mutummutumi masu sarrafa wafer azaman masu tasiri don sarrafa canjin wafer tsakanin kayan aiki, haɓaka haɓakar samarwa.
Kammalawa
XKH ya ƙware a cikin R & D da kuma samar da musamman silicon carbide (SiC) da kuma alumina (Al₂O₃) yumbu aka gyara, ciki har da robotic makamai, cantilever paddles, vacuum chucks, wafer jiragen ruwa, makera shambura, da sauran high-yi sassa, bauta semiconductors, sabon makamashi, Aerospace, da kuma high-temperature. Muna bin madaidaicin masana'anta, ingantaccen iko mai inganci, da sabbin fasahohin fasaha, haɓaka hanyoyin haɓaka haɓaka haɓaka (misali, sintering mara ƙarfi, ɓacin rai) da ingantattun dabarun machining (misali, niƙa CNC, gogewa) don tabbatar da juriya mai tsayi na musamman, ƙarfin injin, inertness sinadarai, da daidaiton girma. Muna goyan bayan keɓancewa dangane da zane-zane, bayar da ingantattun mafita don girma, sifofi, ƙarewar ƙasa, da maki kayan aiki don saduwa da takamaiman bukatun abokin ciniki. Mun himmatu don samar da abin dogaro da ingantaccen kayan yumbu don masana'anta na ƙarshen duniya, haɓaka aikin kayan aiki da ingantaccen samarwa ga abokan cinikinmu.
