Menene alamomin kimanta ingancin wafer?

Tare da ci gaba da ci gaban fasahar semiconductor, a cikin masana'antar semiconductor har ma da masana'antar photovoltaic, abubuwan da ake buƙata don ingancin saman wafer substrate ko takardar epitaxial suma suna da tsauri.Don haka, menene ingancin buƙatun wafers?Ɗaukar wafer sapphire a matsayin misali, waɗanne alamomi za a iya amfani da su don kimanta ingancin wafers?

Menene alamomin kimanta wafers?

Manuniya Uku
Don wafers ɗin sapphire, alamun ƙimar sa shine jimlar kauri (TTV), lanƙwasa (Bow) da Warp (Warp).Waɗannan sigogi guda uku tare suna nuna daidaito da kauri iri ɗaya na wafer silicon, kuma suna iya auna ma'aunin wafer.Ana iya haɗa corrugation tare da lebur don kimanta ingancin farfajiyar wafer.

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Menene TTV, BOW, Warp?
TTV (Jimlar Bambancin Kauri)

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TTV shine bambanci tsakanin matsakaicin matsakaici da mafi ƙarancin kauri na wafer.Wannan ma'auni shine mahimman bayanai da ake amfani da su don auna daidaituwar kaurin wafer.A cikin tsari na semiconductor, kauri na wafer dole ne ya zama iri ɗaya a kan gaba ɗaya.Yawanci ana yin ma'auni a wurare biyar akan wafer kuma ana ƙididdige bambanci.Ƙarshe, wannan darajar ita ce muhimmiyar mahimmanci don yin la'akari da ingancin wafer.

Ruku'u

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Baka a masana'antar semiconductor tana nufin lanƙwasa wafer, yana 'yantar da tazarar tsaka-tsakin wafer ɗin da ba a ɗaure ba da jirgin sama mai nuni.Wataƙila kalmar ta fito ne daga bayanin siffar abu idan an lanƙwasa shi, kamar lanƙwasa siffar baka.Ana bayyana ƙimar baka ta aunawa tsakanin tsakiya da gefen wafer silicon.Yawanci ana bayyana wannan ƙimar a cikin mitoci (µm).

Warp

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Warp mallakin wafers ne na duniya wanda ke auna bambanci tsakanin matsakaicin matsakaici da mafi ƙarancin tazara tsakanin tsakiyar wafer ɗin da ba a ɗaure shi da yardar rai da jirgin sama.Yana wakiltar nisa daga saman wafer siliki zuwa jirgin sama.

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Menene bambanci tsakanin TTV, Bow, Warp?

TTV yana mai da hankali kan canje-canje a cikin kauri kuma baya damuwa da lanƙwasa ko murdiya na wafer.

Baka tana mai da hankali kan lanƙwasawa gabaɗaya, galibi la'akari da lanƙwasawa na wurin tsakiya da gefen.

Warp ya fi girma, gami da lanƙwasa da murɗa duk saman wafer.

Ko da yake waɗannan sigogi guda uku suna da alaƙa da siffa da kaddarorin geometric na wafer silicon, ana auna su kuma an kwatanta su daban, kuma tasirinsu akan tsarin semiconductor da sarrafa wafer shima ya bambanta.

Ƙananan ma'auni guda uku, mafi kyau, kuma mafi girma mafi girma, mafi girma mummunan tasiri akan tsarin semiconductor.Sabili da haka, a matsayin mai aikin semiconductor, dole ne mu fahimci mahimmancin sigogin bayanan martaba na wafer don duk tsarin tsari, yin aikin semiconductor, dole ne mu kula da cikakkun bayanai.

(tashin hankali)


Lokacin aikawa: Juni-24-2024