A cikin ci gaban masana'antar semiconductor mai tasowa, an goge lu'ulu'u guda ɗaya mai gogewawafers na siliconsuna taka muhimmiyar rawa. Suna aiki a matsayin kayan aiki na asali don samar da na'urori daban-daban na lantarki. Daga da'irori masu rikitarwa da daidaito zuwa na'urori masu sarrafawa masu sauri da na'urori masu aiki da yawa, lu'ulu'u mai gogewawafers na siliconsuna da mahimmanci. Bambancin da ke cikin aikinsu da ƙayyadaddun bayanai suna shafar inganci da aikin samfuran ƙarshe kai tsaye. Ga ƙayyadaddun bayanai da sigogi na gama gari na wafers ɗin silicon guda ɗaya da aka goge:

Diamita: Ana auna girman wafers ɗin silicon guda ɗaya na semiconductor ta hanyar diamita, kuma suna zuwa cikin takamaiman bayanai daban-daban. Diamita na gama gari sun haɗa da inci 2 (50.8mm), inci 3 (76.2mm), inci 4 (100mm), inci 5 (125mm), inci 6 (150mm), inci 8 (200mm), inci 12 (300mm), da inci 18 (450mm). Diamita daban-daban sun dace da buƙatun samarwa da buƙatun tsari daban-daban. Misali, ana amfani da ƙananan wafers na diamita don na'urori na lantarki na musamman, ƙananan girma, yayin da manyan wafers na diamita suna nuna ingantaccen samarwa da fa'idodin farashi a cikin kera da'irar haɗin kai mai girma. Ana rarraba buƙatun saman a matsayin mai goge gefe ɗaya (SSP) da mai goge gefe biyu (DSP). Ana amfani da wafers na gefe ɗaya don na'urori masu buƙatar babban lanƙwasa a gefe ɗaya, kamar wasu na'urori masu auna firikwensin. Ana amfani da wafers na gefe biyu don da'irar haɗin kai da sauran samfuran da ke buƙatar babban daidaito a saman biyu. Bukatar Fuskar Sama (Kammalawa): SSP mai gogewa gefe ɗaya / DSP mai gogewa gefe biyu.

Nau'i/Dopant: (1) Semiconductor na nau'in N: Lokacin da aka shigar da wasu ƙwayoyin cuta marasa tsarki a cikin semiconductor na ciki, suna canza ikon sarrafa shi. Misali, lokacin da aka ƙara abubuwan pentavalent kamar nitrogen (N), phosphorus (P), arsenic (As), ko antimony (Sb), electrons na valence suna samar da haɗin covalent tare da electrons na valence na atoms na silicon da ke kewaye, suna barin ƙarin electron wanda ba a ɗaure shi da haɗin covalent ba. Wannan yana haifar da yawan electron fiye da yawan rami, yana samar da semiconductor na nau'in N, wanda aka sani da semiconductor na nau'in electron. Semiconductor na nau'in N suna da mahimmanci wajen kera na'urorin da ke buƙatar electrons a matsayin manyan masu ɗaukar caji, kamar wasu na'urorin wutar lantarki. (2) Semiconductor na nau'in P: Lokacin da aka shigar da abubuwan da ba su da tsarki kamar boron (B), gallium (Ga), ko indium (In) cikin semiconductor na silicon, electrons na valence na atoms marasa tsarki suna samar da haɗin covalent tare da atoms na silicon da ke kewaye, amma ba su da aƙalla electron valence ɗaya kuma ba za su iya samar da cikakken haɗin covalent ba. Wannan yana haifar da yawan ramuka fiye da yawan electrons, wanda ke samar da semiconductor na nau'in P, wanda kuma aka sani da semiconductor na nau'in rami. Semiconductor na nau'in P suna taka muhimmiyar rawa wajen kera na'urori inda ramuka ke aiki a matsayin manyan masu ɗaukar caji, kamar diodes da wasu transistor.

Juriya: Juriya muhimmin adadi ne na zahiri wanda ke auna juriyar lantarki na wafers silicon guda ɗaya da aka goge. Darajarsa tana nuna aikin watsawa na kayan. Mafi ƙarancin juriya, mafi kyawun watsawa na wafer silicon; akasin haka, mafi girman juriya, mafi ƙarancin watsawa. Juriyar wafers silicon ana tantance ta ne ta hanyar abubuwan da ke cikin su, kuma zafin jiki yana da tasiri mai mahimmanci. Gabaɗaya, juriyar wafers silicon yana ƙaruwa tare da zafin jiki. A aikace-aikace, na'urori daban-daban na lantarki suna da buƙatun juriya daban-daban don wafers silicon. Misali, wafers da ake amfani da su a cikin kera da'ira masu haɗawa suna buƙatar ingantaccen iko na juriya don tabbatar da aikin na'ura mai dorewa da aminci.

Hanya: Hanya ta lu'ulu'u ta wafer tana wakiltar alkiblar lu'ulu'u ta layin silicon, wanda galibi Miller ya ƙayyade kamar (100), (110), (111), da sauransu. Alamomin lu'ulu'u daban-daban suna da halaye daban-daban na zahiri, kamar yawan layi, wanda ya bambanta dangane da yanayin. Wannan bambanci na iya shafar aikin wafer a cikin matakan sarrafawa na gaba da kuma aikin ƙarshe na na'urorin lantarki. A cikin tsarin kera, zaɓar wafer silicon tare da yanayin da ya dace don buƙatun na'urori daban-daban na iya inganta aikin na'ura, inganta ingancin samarwa, da haɓaka ingancin samfura.

Faɗi/Fiɗi: Gefen lebur (Flat) ko V-notch (Fiɗi) a kewayen wafer ɗin silicon yana taka muhimmiyar rawa a daidaita yanayin lu'ulu'u kuma muhimmin abu ne wajen kera da sarrafa wafer ɗin. Wafers masu diamita daban-daban sun dace da ma'auni daban-daban na tsawon Faɗi ko Fiɗi. Gefen jerawa an rarraba su zuwa babban lebur da babban lebur. Babban lebur ana amfani da shi ne musamman don tantance yanayin lu'ulu'u na asali da ma'anar sarrafa wafer ɗin, yayin da babban lebur ɗin na biyu ke taimakawa wajen daidaita daidaito da sarrafawa, yana tabbatar da aiki da daidaiton wafer ɗin a duk faɗin layin samarwa.

Kauri: Kauri na wafer yawanci ana ƙayyade shi a cikin micrometers (μm), tare da kauri na gama gari tsakanin 100μm da 1000μm. Wafers masu kauri daban-daban sun dace da nau'ikan na'urorin lantarki daban-daban. Wafers masu sirara (misali, 100μm - 300μm) galibi ana amfani da su don kera guntu waɗanda ke buƙatar kulawa mai ƙarfi, rage girman da nauyin guntu da ƙara yawan haɗin kai. Wafers masu kauri (misali, 500μm - 1000μm) ana amfani da su sosai a cikin na'urori waɗanda ke buƙatar ƙarfin injiniya mafi girma, kamar na'urorin semiconductor masu ƙarfi, don tabbatar da kwanciyar hankali yayin aiki.

Rashin Tsauri a Fuskar Sama: Rashin Tsauri a saman yana ɗaya daga cikin mahimman sigogi don kimanta ingancin wafer, domin yana shafar mannewa kai tsaye tsakanin wafer da kayan fim masu siriri da aka ajiye daga baya, da kuma aikin lantarki na na'urar. Yawanci ana bayyana shi a matsayin matsakaicin matsakaicin murabba'i (RMS) (a cikin nm). Rashin Tsauri a saman ƙasa yana nufin saman wafer yana da santsi, wanda ke taimakawa rage abubuwan da ke faruwa kamar watsawar electron da inganta aikin na'ura da aminci. A cikin ci gaba da kera semiconductor, buƙatun tsauri a saman suna ƙara zama masu tsauri, musamman ga kera da'irori masu haɗaka, inda dole ne a sarrafa tsauri a saman zuwa 'yan nanometers ko ma ƙasa da haka.

Bambancin Kauri Gabaɗaya (TTV): Bambancin kauri gaba ɗaya yana nufin bambanci tsakanin matsakaicin da mafi ƙarancin kauri da aka auna a wurare da yawa akan saman wafer, wanda yawanci ake nunawa a cikin μm. Babban TTV na iya haifar da karkacewa a cikin ayyuka kamar photolithography da etching, yana shafar daidaiton aikin na'ura da yawan aiki. Saboda haka, sarrafa TTV yayin ƙera wafer muhimmin mataki ne na tabbatar da ingancin samfura. Don ƙera na'urorin lantarki masu inganci, yawanci ana buƙatar TTV ya kasance cikin 'yan micrometers.

Baka: Baka yana nufin karkacewa tsakanin saman wafer da kuma madaidaicin matakin lebur, wanda yawanci ana auna shi a cikin μm. Wafers masu yawan sunkuyawa na iya karyewa ko fuskantar damuwa mara daidaituwa yayin sarrafawa na gaba, wanda ke shafar ingancin samarwa da ingancin samfur. Musamman a cikin hanyoyin da ke buƙatar babban lanƙwasa, kamar photolithography, dole ne a sarrafa sunkuyawa a cikin takamaiman kewayon don tabbatar da daidaito da daidaiton tsarin photolithography.

Warp: Warp yana nuna karkacewa tsakanin saman wafer da siffar zagaye mai kyau, wanda aka auna a cikin μm. Kamar baka, warp muhimmin alama ne na lanƙwasa wafer. Warp mai yawa ba wai kawai yana shafar daidaiton sanya wafer a cikin kayan aiki ba, har ma yana iya haifar da matsaloli yayin tsarin marufi na guntu, kamar rashin haɗin kai tsakanin guntu da kayan marufi, wanda hakan ke shafar amincin na'urar. A cikin masana'antar semiconductor mai inganci, buƙatun warp suna ƙara zama masu tsauri don biyan buƙatun ci gaba na kera guntu da tsarin marufi.

Bayanin Gefen: Bayanin Gefen Wafer yana da matuƙar muhimmanci ga sarrafawa da sarrafa shi daga baya. Yawanci ana ƙayyade shi ta hanyar Yankin Keɓewa na Edge (EEZ), wanda ke ƙayyade nisan da ke tsakanin gefen Wafer inda ba a yarda da sarrafawa ba. Tsarin gefen da aka tsara da kyau da kuma daidaitaccen ikon EEZ yana taimakawa wajen guje wa lahani na gefen, yawan damuwa, da sauran matsaloli yayin sarrafawa, yana inganta ingancin wafer gabaɗaya da yawan amfanin ƙasa. A wasu hanyoyin kera kayayyaki na zamani, ana buƙatar daidaiton bayanin gefen don ya kasance a matakin sub-micron.

Adadin Barbashi: Adadin da girman barbashi da ke kan saman wafer yana shafar aikin na'urorin lantarki na microelectronic sosai. Barbashi da yawa ko manyan na iya haifar da gazawar na'ura, kamar gajerun da'irori ko zubewa, rage yawan amfanin samfur. Saboda haka, yawanci ana auna adadin barbashi ta hanyar ƙidaya barbashi a kowane yanki, kamar adadin barbashi da ya fi 0.3μm. Tsananin iko na adadin barbashi yayin ƙera wafer muhimmin ma'auni ne don tabbatar da ingancin samfur. Ana amfani da fasahar tsaftacewa ta zamani da muhallin samarwa mai tsabta don rage gurɓatar barbashi a saman wafer.

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