Tun daga shekarun 1980, yawan haɗakar da'irori na lantarki yana ƙaruwa a kowace shekara na 1.5× ko sauri. Haɗakarwa mafi girma tana haifar da ƙarin yawan wutar lantarki da samar da zafi yayin aiki.Idan ba a wargaza shi yadda ya kamata ba, wannan zafi zai iya haifar da gazawar zafi da kuma rage tsawon rayuwar kayan lantarki.
Domin biyan buƙatun kula da zafi da ke ƙaruwa, ana yin bincike sosai kan kayan marufi na lantarki masu ingantaccen ƙarfin lantarki da kuma inganta su.
Kayan haɗin lu'u-lu'u/tagulla
01 Lu'u-lu'u da Tagulla
Kayan marufi na gargajiya sun haɗa da yumbu, robobi, ƙarfe, da ƙarfen ƙarfe. Yumbu kamar BeO da AlN suna nuna CTEs masu dacewa da semiconductors, kyakkyawan kwanciyar hankali na sinadarai, da matsakaicin ƙarfin zafi. Duk da haka, sarrafawarsu mai rikitarwa, farashi mai yawa (musamman mai guba BeO), da iyakokin ƙanƙantar aiki. Marufi na filastik yana ba da ƙarancin farashi, nauyi mai sauƙi, da rufin rufi amma yana fama da ƙarancin ƙarfin zafi da rashin kwanciyar hankali na zafin jiki mai yawa. Tsarkakakkun ƙarfe (Cu, Ag, Al) suna da ƙarfin juriya na zafi mai yawa amma CTE mai yawa, yayin da ƙarfe (Cu-W, Cu-Mo) ke lalata aikin zafi. Don haka, ana buƙatar sabbin kayan marufi da ke daidaita ƙarfin juriya na zafi mai yawa da ingantaccen CTE cikin gaggawa.
| Ƙarfafawa | Tsarin isar da zafi (W/(m·K)) | CTE (×10⁻⁶/℃) | Yawan yawa (g/cm³) |
| Lu'u-lu'u | 700–2000 | 0.9–1.7 | 3.52 |
| Ƙwayoyin BeO | 300 | 4.1 | 3.01 |
| Ƙwayoyin AlN | 150–250 | 2.69 | 3.26 |
| Ƙwayoyin SiC | 80–200 | 4.0 | 3.21 |
| Ƙwayoyin B₄C | 29–67 | 4.4 | 2.52 |
| Zaren boron | 40 | ~5.0 | 2.6 |
| Ƙwayoyin TiC | 40 | 7.4 | 4.92 |
| Ƙwayoyin Al₂O₃ | 20–40 | 4.4 | 3.98 |
| Sis ɗin SiC | 32 | 3.4 | – |
| Ƙwayoyin Si₃N₄ | 28 | 1.44 | 3.18 |
| Ƙwayoyin TiB₂ | 25 | 4.6 | 4.5 |
| Ƙwayoyin SiO₂ | 1.4 | <1.0 | 2.65 |
Lu'u-lu'u, abu mafi wahalar sani na halitta (Mohs 10), shi ma yana da na musammanMaida wutar lantarki ta zafi (200–2200 W/(m·K)).
Foda mai siffar lu'u-lu'u
Tagulla, tare da babban ƙarfin lantarki/zafin lantarki (401 W/(m·K)), ductility, da kuma ingancin farashi, ana amfani da su sosai a cikin ICs.
Haɗa waɗannan kaddarorin,lu'u-lu'u / jan karfe (Dia/Cu) abubuwan da aka haɗa—tare da Cu a matsayin matrix da lu'u-lu'u a matsayin ƙarfafawa—suna fitowa a matsayin kayan sarrafa zafi na zamani.
02 Manyan Hanyoyin Ƙirƙira
Hanyoyin da aka saba amfani da su wajen shirya lu'u-lu'u/jan ƙarfe sun haɗa da: aikin ƙarfe na foda, hanyar zafi mai yawa da matsin lamba mai yawa, hanyar narkewar narkewa, hanyar tacewa ta plasma, hanyar fesawa da sanyi, da sauransu.
Kwatanta hanyoyin shiri daban-daban, tsari da halayen abubuwan haɗin lu'u-lu'u/jan ƙarfe masu girman barbashi ɗaya
| Sigogi | Foda Metallurgy | Injin Matsewa Mai Zafi | Spark Plasma Sintering (SPS) | Zafin Jiki Mai Matsi Mai Girma (HPHT) | Ajiye Feshi Mai Sanyi | Narkewa Shiga |
| Nau'in Lu'u-lu'u | MBD8 | HFD-D | MBD8 | MBD4 | PDA | MBD8/HHD |
| Matrix | Foda 99.8% Cu | Foda mai amfani da electrolytic 99.9% | Foda 99.9% Cu | Foda mai gauraya/tsabtace Cu | Foda mai tsarki na Cu | Tsarkake Cu girma/sanda |
| Gyaran Fuskar Sadarwa | – | – | – | B, Ti, Si, Cr, Zr, W, Mo | – | – |
| Girman Ƙwayoyin Cuku (μm) | 100 | 106–125 | 100–400 | 20–200 | 35–200 | 50–400 |
| Juzu'i Mai Girma (%) | 20–60 | 40–60 | 35–60 | 60–90 | 20–40 | 60–65 |
| Zafin jiki (°C) | 900 | 800–1050 | 880–950 | 1100–1300 | 350 | 1100–1300 |
| Matsi (MPa) | 110 | 70 | 40–50 | 8000 | 3 | 1–4 |
| Lokaci (minti) | 60 | 60–180 | 20 | 6–10 | – | 5–30 |
| Yawan Dangantaka (%) | 98.5 | 99.2–99.7 | – | – | – | 99.4–99.7 |
| Aiki | ||||||
| Mafi kyawun Tsarin Zafin Jiki (W/(m·K)) | 305 | 536 | 687 | 907 | – | 943 |
Dabarun gama-gari na Dia/C sun haɗa da:
(1)Foda Metallurgy
Ana matse garin lu'u-lu'u da aka haɗa da kuma niƙa shi. Duk da cewa yana da sauƙin amfani kuma yana da araha, wannan hanyar tana samar da ƙarancin yawa, ƙananan tsarin da ba su da kama da juna, da kuma ƙayyadaddun girman samfura.
Sna'urar da ke haɗa kai
(1)Zafin Jiki Mai Matsi Mai Girma (HPHT)
Ta amfani da na'urorin matsewa da yawa, narkakken Cu yana shiga cikin lattices na lu'u-lu'u a cikin mawuyacin yanayi, yana samar da haɗakar abubuwa masu yawa. Duk da haka, HPHT yana buƙatar molds masu tsada kuma bai dace da samar da su ba a manyan sikelin.
Cubic press
(1)Narkewa Shiga
Molten Cu yana ratsawa ta hanyar shigar da lu'u-lu'u ta hanyar taimakon matsi ko kuma ta hanyar shigar da capillary. Abubuwan da suka haifar da hakan sun kai ga yawan zafin jiki da ya wuce 446 W/(m·K).
(2)Spark Plasma Sintering (SPS)
Wutar lantarki da ke bugawa da sauri tana lalata foda da aka gauraya a ƙarƙashin matsin lamba. Duk da cewa yana da inganci, aikin SPS yana raguwa idan aka kwatanta da ɗimbin lu'u-lu'u sama da 65%.
Tsarin tsarin fitar da sinadarin plasma
(5) Ajiye Feshi Mai Sanyi
Ana hanzarta yin foda a kan abubuwan da aka yi amfani da su. Wannan sabuwar hanyar tana fuskantar ƙalubale wajen sarrafa ƙarewar saman da kuma tabbatar da aikin zafi.
03 Gyaran Fuskar Sadarwa
Don shirya kayan haɗin gwiwa, jika juna tsakanin sassa muhimmin abu ne ga tsarin haɗin gwiwa kuma muhimmin abu ne da ke shafar tsarin haɗin gwiwa da yanayin haɗin gwiwa. Yanayin rashin jika a haɗin gwiwa tsakanin lu'u-lu'u da Cu yana haifar da juriya mai ƙarfi ga yanayin zafi. Saboda haka, yana da matuƙar muhimmanci a gudanar da bincike kan gyare-gyare kan haɗin gwiwa tsakanin su biyun ta hanyoyi daban-daban na fasaha. A halin yanzu, akwai hanyoyi guda biyu da za a iya inganta matsalar haɗin gwiwa tsakanin lu'u-lu'u da Cu: (1) Maganin gyaran fuska na lu'u-lu'u; (2) Maganin haɗa matrix na tagulla.
Zane-zanen zane na gyare-gyare: (a) Rufe kai tsaye a saman lu'u-lu'u; (b) Haɗa Matrix
(1) Gyaran saman lu'u-lu'u
Sanya abubuwa masu aiki kamar Mo, Ti, W da Cr a saman matakin ƙarfafawa na iya inganta halayen haɗin lu'u-lu'u, ta haka yana haɓaka ƙarfin zafinsa. Yin sintiri na iya ba wa abubuwan da ke sama damar yin hulɗa da carbon a saman foda lu'u-lu'u don samar da layin canzawar carbide. Wannan yana inganta yanayin jika tsakanin lu'u-lu'u da tushen ƙarfe, kuma rufin na iya hana tsarin lu'u-lu'u canzawa a yanayin zafi mai yawa.
(2) Haɗa matrix na tagulla
Kafin a sarrafa kayan haɗin gwiwa, ana yin maganin haɗin gwiwa kafin a haɗa shi da jan ƙarfe, wanda zai iya samar da kayan haɗin gwiwa waɗanda galibi suna da ƙarfin jure zafi mai yawa. Yin amfani da abubuwan da ke aiki a cikin matrix na jan ƙarfe ba wai kawai zai iya rage kusurwar jikewa tsakanin lu'u-lu'u da jan ƙarfe ba, har ma yana samar da layin carbide wanda yake narkewa da ƙarfi a cikin matrix na jan ƙarfe a cikin mahaɗin lu'u-lu'u / Cu bayan amsawar. Ta wannan hanyar, yawancin gibin da ke akwai a mahaɗin kayan ana gyara su kuma a cike su, ta haka ne ake inganta ƙarfin jure zafi.
04 Kammalawa
Kayan marufi na gargajiya ba su da ƙarfi wajen sarrafa zafi daga chips na zamani. Haɗaɗɗun Dia/Cu, tare da CTE mai iya daidaitawa da kuma ƙarfin watsa zafi mai ƙarfi, suna wakiltar mafita mai canzawa ga na'urorin lantarki na zamani.
A matsayinta na babbar kamfani mai fasaha da ke haɗa masana'antu da ciniki, XKH ta mai da hankali kan bincike da haɓakawa da samar da kayan haɗin lu'u-lu'u/jan ƙarfe da kuma kayan haɗin matrix na ƙarfe masu aiki kamar SiC/Al da Gr/Cu, suna samar da sabbin hanyoyin sarrafa zafi tare da ƙarfin watsa zafi sama da 900W/(m·K) don fannoni na marufi na lantarki, na'urorin wutar lantarki da kuma sararin samaniya.
XKH'Kayan haɗin laminate mai lu'u-lu'u da aka lulluɓe da jan ƙarfe:
Lokacin Saƙo: Mayu-12-2025